Knowledge Management System of Institue of Mechanics, CAS
Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy | |
Qian J(钱劲); Yu TX(余同希); Zhao YP(赵亚溥); Zhao, YP (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech LNM, Inst Mech, Beijing 100080, Peoples R China. | |
Source Publication | Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems |
2005 | |
Volume | 11Issue:2-3Pages:97-103 |
ISSN | 0946-7076 |
Abstract | This paper describes the stress characterization of a cantilever structure of a piezoresistive microflowmeter using micro-Raman spectroscopy. In order to obtain the relationship between the stress and the shift of Raman frequency, the mechanical stress in the structure was assumed to be uniaxial according to the applied loading and the boundary conditions. Also, the two-dimensional stress distribution of the structure was simulated using a finite element tool (ABAQUS v 6.2). The experimental results agree well to those predicted by the finite element simulation. It is concluded that micro-Raman spectroscopy is an accurate, non-destructive technique for measuring Microelectromechanical systems (MEMS) local stress with micrometer spatial resolution. |
Subject Area | 力学 |
DOI | 10.1007/s00542-004-0460-x |
Indexed By | SCI |
Language | 英语 |
WOS ID | WOS:000226664900005 |
WOS Keyword | MECHANICAL-STRESS ; SILICON ; PARAMETERS ; DIAMOND ; DEVICES ; GAP |
WOS Research Area | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
WOS Subject | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://dspace.imech.ac.cn/handle/311007/15425 |
Collection | 力学所知识产出(1956-2008) |
Corresponding Author | Zhao, YP (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech LNM, Inst Mech, Beijing 100080, Peoples R China. |
Recommended Citation GB/T 7714 | Qian J,Yu TX,Zhao YP,et al. Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy[J]. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,2005,11,2-3,:97-103. |
APA | 钱劲,余同希,赵亚溥,&Zhao, YP .(2005).Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy.Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,11(2-3),97-103. |
MLA | 钱劲,et al."Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy".Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems 11.2-3(2005):97-103. |
Files in This Item: | Download All | |||||
File Name/Size | DocType | Version | Access | License | ||
81503.pdf(452KB) | 开放获取 | -- | View Download |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment