IMECH-IR  > 力学所知识产出(1956-2008)
Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy
Qian J(钱劲); Yu TX(余同希); Zhao YP(赵亚溥); Zhao, YP (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech LNM, Inst Mech, Beijing 100080, Peoples R China.
Source PublicationMicrosystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
2005
Volume11Issue:2-3Pages:97-103
ISSN0946-7076
AbstractThis paper describes the stress characterization of a cantilever structure of a piezoresistive microflowmeter using micro-Raman spectroscopy. In order to obtain the relationship between the stress and the shift of Raman frequency, the mechanical stress in the structure was assumed to be uniaxial according to the applied loading and the boundary conditions. Also, the two-dimensional stress distribution of the structure was simulated using a finite element tool (ABAQUS v 6.2). The experimental results agree well to those predicted by the finite element simulation. It is concluded that micro-Raman spectroscopy is an accurate, non-destructive technique for measuring Microelectromechanical systems (MEMS) local stress with micrometer spatial resolution.
Subject Area力学
DOI10.1007/s00542-004-0460-x
Indexed BySCI
Language英语
WOS IDWOS:000226664900005
WOS KeywordMECHANICAL-STRESS ; SILICON ; PARAMETERS ; DIAMOND ; DEVICES ; GAP
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
Citation statistics
Cited Times:8[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/15425
Collection力学所知识产出(1956-2008)
Corresponding AuthorZhao, YP (reprint author), Chinese Acad Sci, State Key Lab Nonlinear Mech LNM, Inst Mech, Beijing 100080, Peoples R China.
Recommended Citation
GB/T 7714
Qian J,Yu TX,Zhao YP,et al. Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy[J]. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,2005,11,2-3,:97-103.
APA 钱劲,余同希,赵亚溥,&Zhao, YP .(2005).Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy.Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems,11(2-3),97-103.
MLA 钱劲,et al."Two-Dimensional Stress Measurement of a Micromachined Piezoresistive Structure with Micro-Raman Spectroscopy".Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems 11.2-3(2005):97-103.
Files in This Item: Download All
File Name/Size DocType Version Access License
81503.pdf(452KB) 开放获取--View Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Lanfanshu
Similar articles in Lanfanshu
[钱劲]'s Articles
[余同希]'s Articles
[赵亚溥]'s Articles
Baidu academic
Similar articles in Baidu academic
[钱劲]'s Articles
[余同希]'s Articles
[赵亚溥]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[钱劲]'s Articles
[余同希]'s Articles
[赵亚溥]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: 81503.pdf
Format: Adobe PDF
This file does not support browsing at this time
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.