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Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition | |
Liu MH; Hu XW; Wu HM(吴汉明); Wu QC; Yu GY; Pan Y; Liu, MH (reprint author), Huazhong Univ Sci & Technol, Dept Elect Engn, Wuhan 430074, Hubei, Peoples R China. | |
Source Publication | Surface & Coatings Technology |
2000 | |
Volume | 131Issue:1-3Pages:29-33 |
ISSN | 0257-8972 |
Abstract | Using a refined two-dimensional hybrid-model with self-consistent microwave absorption, we have investigated the change of plasma parameters such as plasma density and ionization rate with the operating conditions. The dependence of the ion current density and ion energy and angle distribution function at the substrate surface vs. the radial position, pressure and microwave power were discussed. Results of our simulation can be compared qualitatively with many experimental measurements. |
Subject Area | 力学 |
DOI | 10.1016/S0257-8972(00)00798-2 |
Indexed By | SCI |
Language | 英语 |
WOS ID | WOS:000165548200006 |
WOS Keyword | MODE TRANSITION ; LOW-PRESSURE ; DISCHARGES ; BEHAVIOR ; DENSITY |
WOS Research Area | Materials Science ; Physics |
WOS Subject | Materials Science, Coatings & Films ; Physics, Applied |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://dspace.imech.ac.cn/handle/311007/15936 |
Collection | 力学所知识产出(1956-2008) |
Corresponding Author | Liu, MH (reprint author), Huazhong Univ Sci & Technol, Dept Elect Engn, Wuhan 430074, Hubei, Peoples R China. |
Recommended Citation GB/T 7714 | Liu MH,Hu XW,Wu HM,et al. Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition[J]. Surface & Coatings Technology,2000,131,1-3,:29-33. |
APA | Liu MH.,Hu XW.,吴汉明.,Wu QC.,Yu GY.,...&Liu, MH .(2000).Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition.Surface & Coatings Technology,131(1-3),29-33. |
MLA | Liu MH,et al."Two-dimensional simulation of an electron cyclotron resonance plasma source with self-consistent power deposition".Surface & Coatings Technology 131.1-3(2000):29-33. |
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