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Mechanics of Adhesion in MEMS-a Review
Zhao YP(赵亚溥); Wang LS(王立森); Yu TX(余同希)
2003
发表期刊Journal of Adhesion Science and Technology
卷号17期号:4页码:519-546
ISSN0169-4243
摘要A review is presented of the mechanics of microscale adhesion in microelectromechanical systems (MEMS). Some governing dimensionless numbers such as Tabor number, adhesion parameter and peel number for microscale elastic adhesion contact are discussed in detail. The peel number is modified for the elastic contact between a rough surface in contact with a smooth plane. Roughness ratio is introduced to characterize the relative importance of surface roughness for microscale adhesion contact, and three kinds of asperity height distributions are discussed: Gaussian, fractal, and exponential distributions. Both Gaussian and exponential distributions are found to be special cases of fractal distribution. Casimir force induced adhesion in MEMS, and adhesion of carbon nanotubes to a substrate are also discussed. Finally, microscale plastic adhesion contact theory is briefly reviewed, and it is found that the dimensionless number, plasticity index of various forms, can be expressed by the roughness ratio.
学科领域力学
DOI10.1163/15685610360554393
收录类别SCI
语种英语
WOS记录号WOS:000182207800003
WOS研究方向Engineering ; Materials Science ; Mechanics
WOS类目Engineering, Chemical ; Materials Science, Multidisciplinary ; Mechanics
引用统计
被引频次:276[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://dspace.imech.ac.cn/handle/311007/16272
专题力学所知识产出(1956-2008)
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Zhao YP,Wang LS,Yu TX. Mechanics of Adhesion in MEMS-a Review[J]. Journal of Adhesion Science and Technology,2003,17(4):519-546.
APA 赵亚溥,王立森,&余同希.(2003).Mechanics of Adhesion in MEMS-a Review.Journal of Adhesion Science and Technology,17(4),519-546.
MLA 赵亚溥,et al."Mechanics of Adhesion in MEMS-a Review".Journal of Adhesion Science and Technology 17.4(2003):519-546.
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