IMECH-IR  > 力学所知识产出(1956-2008)
Vibration of an Adhered Microbeam Under a Periodically Shaking Electrical Force
Zhang Y(张吟); Zhao YP(赵亚溥); Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
Source PublicationJournal Adhesion Science Technology
2005
Volume19Issue:9Pages:799–815
ISSN0169-4243
AbstractThe vibration analysis of an adhered S-shaped microbeam under alternating sinusoidal voltage is presented. The shaking force is the electrical force due to the sinusoidal voltage. During vibration, both the microbeam deflection and the adhesion length keep changing. The microbeam deflection and adhesion length are numerically determined by the iteration method. As the adhesion length keeps changing, the domain of the equation of motion for the microbeam (unadhered part) changes correspondingly, which results in changes of the structure natural frequencies. For this reason, the system can never reach a steady state. The transient behaviors of the microbeam under different shaking frequencies are compared. We deliberately choose the initial conditions to compare our dynamic results with the existing static theory. The paper also analyzes the changing behavior of adhesion length during vibration and an asymmetric pattern of adhesion length change is revealed, which may be used to guide the dynamic de-adhering process. The abnormal behavior of the adhered microbeam vibrating at almost the same frequency under two quite different shaking frequencies is also shown. The Galerkin method is used to discretize the equation of motion and its convergence study is also presented. The model is only applicable in the case that the peel number is equal to 1. Some other model limitations are also discussed.
Subject Area力学
DOI10.1163/1568561054867864
Indexed BySCI
Language英语
WOS IDWOS:000232071800006
WOS KeywordLINEAR-OSCILLATOR ; MEMS ; ADHESION ; STICTION ; MODEL ; PERFORMANCE ; RESONATORS ; BEHAVIOR ; BEAMS
WOS Research AreaEngineering ; Materials Science ; Mechanics
WOS SubjectEngineering, Chemical ; Materials Science, Multidisciplinary ; Mechanics
Citation statistics
Cited Times:14[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/16959
Collection力学所知识产出(1956-2008)
Corresponding AuthorZhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, LNM, Beijing 100080, Peoples R China.
Recommended Citation
GB/T 7714
Zhang Y,Zhao YP,Zhao, YP . Vibration of an Adhered Microbeam Under a Periodically Shaking Electrical Force[J]. Journal Adhesion Science Technology,2005,19,9,:799–815.
APA 张吟,赵亚溥,&Zhao, YP .(2005).Vibration of an Adhered Microbeam Under a Periodically Shaking Electrical Force.Journal Adhesion Science Technology,19(9),799–815.
MLA 张吟,et al."Vibration of an Adhered Microbeam Under a Periodically Shaking Electrical Force".Journal Adhesion Science Technology 19.9(2005):799–815.
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