IMECH-IR  > 力学所知识产出(1956-2008)
Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators
Guo JG(郭建刚); Zhao YP(赵亚溥); Guo, JG (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
Source PublicationJournal of Microelectromechanical Systems
2004
Volume13Issue:6Pages:1027-1035
ISSN1057-7157
AbstractThe influence of van der Waals (vdW) and Casimir forces on the stability of the electrostatic torsional nanoelectromechanical systems (NEMS) actuators is analyzed in the paper. With the consideration of vdW and Casimir effects, the dependence of the critical tilting angle and pull-in voltage on the sizes of structure is investigated. And the influence of vdW torque is compared with that of Casimir torque. The modified coefficients of vdW and Casimir torques on the pull-in voltage are, respectively, calculated. When the gap is sufficiently small, pull-in can still take place with arbitrary small angle perturbation because of the action of vdW and Casimir torques even if there is not electrostatic torque. And the critical pull-in gaps for two cases are, respectively, derived.
Subject Area力学
DOI10.1109/JMEMS.2004.838390
Indexed BySCI ; EI
Language英语
WOS IDWOS:000225515100017
WOS KeywordPULL-IN ; DYNAMIC-BEHAVIOR ; MEMS ; MODEL ; MICROMIRRORS ; SWITCH
WOS Research AreaEngineering
WOS SubjectEngineering, Electrical & Electronic ; Engineering, Mechanical
Citation statistics
Cited Times:132[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/17103
Collection力学所知识产出(1956-2008)
Corresponding AuthorGuo, JG (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
Recommended Citation
GB/T 7714
Guo JG,Zhao YP,Guo, JG . Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators[J]. Journal of Microelectromechanical Systems,2004,13,6,:1027-1035.
APA 郭建刚,赵亚溥,&Guo, JG .(2004).Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators.Journal of Microelectromechanical Systems,13(6),1027-1035.
MLA 郭建刚,et al."Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators".Journal of Microelectromechanical Systems 13.6(2004):1027-1035.
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