Characteristics of Gas Flow Within a Micro Diffuser/Nozzle Pump

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	Characteristics of Gas Flow Within a Micro Diffuser/Nozzle Pump
	Li XH; Yu XM; Zhang DC; Cui HH(崔海航); Li T; Wang Y; Wang YY; Yu, XM (reprint author), Peking Univ, Inst Microelect, Beijing 100871, Peoples R China.
发表期刊	Chinese Physics Letters
	2006
卷号	23 期号:5 页码:1230-1233
ISSN	0256-307X
其他摘要	英文摘要: The gas flow characteristics for various shapes of micro diffuser/nozzles have been experimentally investigated. The micro diffuser/nozzles with the lengths of 70 mu m, 90 mu m, 125 mu m and the taper angles of 7 degrees, 10 degrees, 14 degrees are designed and fabricated based on silicon micromachining technology for optimizing and comparing. The flat-wall diffuser/nozzle is 40 mu m x 5 mu m in depth and width. An experimental setup is designed to measure the gas flow rates under controlled temperature and pressure condition. Optimized values for the taper angle and the length of the diffuser/nozzle are experimentally obtained.
学科领域	力学
收录类别	SCI ; EI ; CSCD
语种	英语
WOS记录号	WOS:000237551700046
关键词[WOS]	NEWTONIAN FLUID ; SEDIMENTATION ; SIMULATION
WOS研究方向	Physics
WOS类目	Physics, Multidisciplinary
引用统计	被引频次：3[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/17323
专题	力学所知识产出(1956-2008)
通讯作者	Yu, XM (reprint author), Peking Univ, Inst Microelect, Beijing 100871, Peoples R China.
推荐引用方式 GB/T 7714	Li XH,Yu XM,Zhang DC,et al. Characteristics of Gas Flow Within a Micro Diffuser/Nozzle Pump[J]. Chinese Physics Letters,2006,23,5,:1230-1233.
APA	Li XH.,Yu XM.,Zhang DC.,崔海航.,Li T.,...&Yu, XM .(2006).Characteristics of Gas Flow Within a Micro Diffuser/Nozzle Pump.Chinese Physics Letters,23(5),1230-1233.
MLA	Li XH,et al."Characteristics of Gas Flow Within a Micro Diffuser/Nozzle Pump".Chinese Physics Letters 23.5(2006):1230-1233.

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