An auto-focusing method for imaging ellipsometry system

IMECH-IR > 力学所知识产出(1956-2008)

	An auto-focusing method for imaging ellipsometry system
	Meng YH(孟永宏); Chen S(陈涉); Jin G(靳刚); Jin G
会议录名称	Physica Status Solidi C - Current Topics In Solid State Physics, Vol 5, No 5
	2008
页码	1046-1049
会议名称	4th International Conference on Spectroscopic Ellipsometry (ICSE-4)
会议日期	JUN 11-15, 2007
会议地点	Stockholm, SWEDEN
摘要	An auto-focusing method based on the image brightness gradient sharpness function is presented for imaging ellipsometry system, in which the image plane of the thin-film specimen is not perpendicular to the optical axis. The clear image of a specimen with large area is obtained by moving the imaging sensor in optical axis direction and around its sensitive surface centre successively. The experimental results demonstrate its feasibility.
WOS记录号	WOS:000256862500011
收录类别	CPCI-S ; EI
语种	英语
引用统计	被引频次：1[WOS] [WOS记录] [WOS相关记录]
文献类型	会议论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/25418
专题	力学所知识产出(1956-2008)
通讯作者	Jin G
推荐引用方式 GB/T 7714	Meng YH,Chen S,Jin G,et al. An auto-focusing method for imaging ellipsometry system[C]Physica Status Solidi C - Current Topics In Solid State Physics, Vol 5, No 5,2008:1046-1049.