IMECH-IR  > 力学所知识产出(1956-2008)
An automatic imaging spectroscopic ellipsometer for characterization of nano-film pattern on solid substrate
Meng YH(孟永宏); Chen YY(陈艳艳); Qi C(齐财); Liu L(刘丽); Jin G(靳刚); Jin G
Source PublicationPhysica Status Solidi C - Current Topics In Solid State Physics, Vol 5, No 5
2008
Pages1050-1053
Conference Name4th International Conference on Spectroscopic Ellipsometry (ICSE-4)
Conference DateJUN 11-15, 2007
Conference PlaceStockholm, SWEDEN
AbstractIn order to characterize the physical and spatial properties of nano-film pattern on solid substrates, an automatic imaging spectroscopic ellipsometer (ISE) based on a polarizer - compensator - specimen - analyzer configuration in the visible region is presented. It can provide the spectroscopic ellipsometric parameters psi (x, y, lambda) and Delta (x, y, lambda) of a large area specimen with a lateral resolution in the order of some microns. A SiO2 stepped layers pattern is used to demonstrate the function of the ISE which shows potential application in thin film devices' such as high-throughput bio-chips.
WOS IDWOS:000256862500012
Indexed ByCPCI-S ; EI
Language英语
Citation statistics
Cited Times:7[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/25420
Collection力学所知识产出(1956-2008)
Corresponding AuthorJin G
Recommended Citation
GB/T 7714
Meng YH,Chen YY,Qi C,et al. An automatic imaging spectroscopic ellipsometer for characterization of nano-film pattern on solid substrate[C]Physica Status Solidi C - Current Topics In Solid State Physics, Vol 5, No 5,2008:1050-1053.
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