Knowledge Management System of Institue of Mechanics, CAS
An automatic imaging spectroscopic ellipsometer for characterization of nano-film pattern on solid substrate | |
Meng YH(孟永宏); Chen YY(陈艳艳); Qi C(齐财); Liu L(刘丽); Jin G(靳刚); Jin G | |
Source Publication | Physica Status Solidi C - Current Topics In Solid State Physics, Vol 5, No 5 |
2008 | |
Pages | 1050-1053 |
Conference Name | 4th International Conference on Spectroscopic Ellipsometry (ICSE-4) |
Conference Date | JUN 11-15, 2007 |
Conference Place | Stockholm, SWEDEN |
Abstract | In order to characterize the physical and spatial properties of nano-film pattern on solid substrates, an automatic imaging spectroscopic ellipsometer (ISE) based on a polarizer - compensator - specimen - analyzer configuration in the visible region is presented. It can provide the spectroscopic ellipsometric parameters psi (x, y, lambda) and Delta (x, y, lambda) of a large area specimen with a lateral resolution in the order of some microns. A SiO2 stepped layers pattern is used to demonstrate the function of the ISE which shows potential application in thin film devices' such as high-throughput bio-chips. |
WOS ID | WOS:000256862500012 |
Indexed By | CPCI-S ; EI |
Language | 英语 |
Citation statistics | |
Document Type | 会议论文 |
Identifier | http://dspace.imech.ac.cn/handle/311007/25420 |
Collection | 力学所知识产出(1956-2008) |
Corresponding Author | Jin G |
Recommended Citation GB/T 7714 | Meng YH,Chen YY,Qi C,et al. An automatic imaging spectroscopic ellipsometer for characterization of nano-film pattern on solid substrate[C]Physica Status Solidi C - Current Topics In Solid State Physics, Vol 5, No 5,2008:1050-1053. |
Files in This Item: | Download All | |||||
File Name/Size | DocType | Version | Access | License | ||
Conf.40.pdf(309KB) | 会议论文 | 开放获取 | CC BY-NC-SA | View Download |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment