Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film

IMECH-IR > 力学所知识产出(1956-2008)

	Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film
	Hu YQ(胡宇群); Zhao YP(赵亚溥); Yu TX(余同希); Zhao YP
会议录名称	Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing
	2008
页码	611-616
会议名称	14th International Conference on the Strength of Materials (ICSMA 14)
会议日期	JUN 04-09, 2006
会议地点	Xian Jiaotong Univ, Xian, PEOPLES R CHINA
摘要	Anodic bonding with thin films of metal or alloy as an intermediate layer, finds increasing applications in micro/nanoelectromechanical systems. At the bonding temperature of 350 degrees C, voltage of 400 V, and 30 min duration, the anodic bonding is completed between Pyrex glass and crystalline silicon coated with an aluminum thin film with a thickness comprised between 50 and 230 nm. Sodium-depleted layers and dendritic nanostructures were observed in Pyrex 7740 glass adjacent to the bonding interface. The sodium depletion width does not increase remarkably with the thickness of aluminum film. The dendritic nanostructures result from aluminum diffusion into the Pyrex glass. This experimental research is expected to enhance the understanding of how the depletion layer and dendritic nanostructures affect the quality of anodic bonding. (C) 2007 Elsevier B.V. All rights reserved.
关键词	Anodic Bonding Dendritic Nanostructures Aluminum Thin Film Depletion Layer Mems Ion Drift Processes Borosilicate Glass Depletion
WOS记录号	WOS:000256071100154
收录类别	CPCI-S
语种	英语
引用统计	被引频次：15[WOS] [WOS记录] [WOS相关记录]
文献类型	会议论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/25436
专题	力学所知识产出(1956-2008)
通讯作者	Zhao YP
推荐引用方式 GB/T 7714	Hu YQ,Zhao YP,Yu TX,et al. Formation of dendritic nanostructures in Pyrex glass anodically bonded to silicon coated with an aluminum thin film[C]Materials Science And Engineering A-Structural Materials Properties Microstructure And Processing,2008:611-616.

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