Optimization Of Off-Null Ellipsometry For Air/Solid Interfaces

doi:10.1364/AO.46.008475

IMECH-IR > 力学所知识产出(1956-2008)

	Optimization Of Off-Null Ellipsometry For Air/Solid Interfaces
	Chen YY(陈艳艳); Meng YH(孟永宏); Jin G(靳刚); Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Beisihuan W Rd, Beijing 100080, Peoples R China.
发表期刊	Applied Optics
	2007
页码	8475-8481
ISSN	0003-6935
摘要	The optimization of off-null ellipsometry is described with emphasis on the improvement of sample thickness sensitivity. Optimal conditions are dependent on azimuth angle settings of the polarizer, compensator, and analyzer in a polarizer-compensator-sample-analyzer ellipsometer arrangement. Numerical simulation utilized offers an approach to present the dependence of the sensitivity on the azimuth angle settings, from which optimal settings corresponding to the best sensitivity are derived. For a series of samples of SiO2 layer (thickness in the range of 1.8-6.5 nm) on silicon substrate, the theory analysis proves that sensitivity at the optimal settings is increased 20 times compared to that at null settings used in most works, and the relationship between intensity and thickness is simplified as a linear type instead of the original nonlinear type, with the relative error reduced to similar to 1/100 at the optimal settings. Furthermore the discussion has been extended toward other factors affecting the sensitivity of the practical system, such as the linear dynamic range of the detector, the signal-to-noise ratio and the intensity from the light source, etc. Experimental results from the investigation Of SiO2 layer on silicon substrate are chosen to verify the optimization. (c) 2007 Optical Society of America.
DOI	10.1364/AO.46.008475
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000252229000011
WOS研究方向	Optics
WOS类目	Optics
引用统计	被引频次：23[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/25506
专题	力学所知识产出(1956-2008)
通讯作者	Jin, G (reprint author), Chinese Acad Sci, Inst Mech, 15 Beisihuan W Rd, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Chen YY,Meng YH,Jin G,et al. Optimization Of Off-Null Ellipsometry For Air/Solid Interfaces[J]. Applied Optics,2007:8475-8481.
APA	陈艳艳,孟永宏,靳刚,&Jin, G .(2007).Optimization Of Off-Null Ellipsometry For Air/Solid Interfaces.Applied Optics,8475-8481.
MLA	陈艳艳,et al."Optimization Of Off-Null Ellipsometry For Air/Solid Interfaces".Applied Optics (2007):8475-8481.

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