Piezoelectricity Of Zno Films Prepared By Sol-Gel Method

doi:10.1088/1674-0068/20/06/721-726

IMECH-IR > 力学所知识产出(1956-2008)

	Piezoelectricity Of Zno Films Prepared By Sol-Gel Method
	Zhang KM; Zhao YP(赵亚溥); He FQ(何发泉); Liu DQ; Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
发表期刊	Chinese Journal of Chemical Physics
	2007
页码	721-726
ISSN	1003-7713
摘要	ZnO piezoelectric thin films were prepared on crystal substrate Si(111) by sol-gel technology, then characterized by scanning electron microscopy, X-ray diffraction and atomic force microscopy (AFM). The ZnO films characterized by X-ray diffraction are highly oriented in (002) direction with the growing of the film thickness. The morphologies, roughness and grain size of ZnO film investigated by AFM show that roughness and grain size of ZnO piezoelectric films decrease with the increase of the film thickness. The roughness dimension is 2.188-0.914 nm. The piezoelectric coefficient d(33) was investigated with a piezo-response force microscope (PFM). The results show that the piezoelectric coefficient increases with the increase of thickness and (002) orientation. When the force reference is close to surface roughness of the films, the piezoelectric coefficient measured is inaccurate and fluctuates in a large range, but when the force reference is big, the piezoelectric coefficient d(33) changes little and ultimately keeps constant at a low frequency.
关键词	Zno Thin Films Piezoelectric Coefficient Piezo-response Force Microscope Sol-gel Surface Roughness Resistivity
DOI	10.1088/1674-0068/20/06/721-726
收录类别	SCI
语种	英语
WOS记录号	WOS:000252031900021
关键词[WOS]	RESISTIVITY
WOS研究方向	Physics
WOS类目	Physics, Atomic, Molecular & Chemical
引用统计	被引频次：37[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/25570
专题	力学所知识产出(1956-2008)
通讯作者	Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Zhang KM,Zhao YP,He FQ,et al. Piezoelectricity Of Zno Films Prepared By Sol-Gel Method[J]. Chinese Journal of Chemical Physics,2007:721-726.
APA	Zhang KM,赵亚溥,何发泉,Liu DQ,&Zhao, YP .(2007).Piezoelectricity Of Zno Films Prepared By Sol-Gel Method.Chinese Journal of Chemical Physics,721-726.
MLA	Zhang KM,et al."Piezoelectricity Of Zno Films Prepared By Sol-Gel Method".Chinese Journal of Chemical Physics (2007):721-726.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
J2007-39.pdf（1733KB）			开放获取	--	浏览下载