Residual Stress And Deformation Analysis Of Anodic Bonded Multi-Layer Of Glass And Aluminum

IMECH-IR > 力学所知识产出(1956-2008)

	Residual Stress And Deformation Analysis Of Anodic Bonded Multi-Layer Of Glass And Aluminum
	Liu CR; Lu XY; Yang ZY(杨振宇); Meng QS; Meng, QS (reprint author), Taiyuan Univ Technol, China Educ Minist & Shanxi Provence, Key Lab Adv Mat & Interface Sci, Taiyuan 030024, Peoples R China.
发表期刊	International Journal of Nonlinear Sciences and Numerical Simulation
	2008
页码	347-353
ISSN	1565-1339
摘要	The bonding of glass wafer to aluminum foils in multi-layer assemblies was made by the common anodic bonding process. The bonding was performed at temperatures in the range 350-450 degrees C and with an applied voltage in the range 400-700 V under a pressure of 0.05 MPa. Residual stress and deformation in samples of two-layer (aluminum/glass) and three-layer (glass/aluminum/glass) were analyzed by nonlinear finite element simulation software MARC. The stress and strain varying with cooling time were obtained. The analyzed results show that deformation of the three-layer sample is significantly smaller than that of the two-layer sample, because of the symmetric structure of the three-layer sample. This has an important advantage in MEMS fabrication. The maximum equivalent stresses locate in the transition layer in both samples, which will become weakness in bonded sample.
关键词	Anodic Bonding Mems Aluminum Glass Residual Stress Finite Element
收录类别	SCI
语种	英语
WOS记录号	WOS:000260106100006
WOS研究方向	Engineering ; Mathematics ; Mechanics ; Physics
WOS类目	Engineering, Multidisciplinary ; Mathematics, Applied ; Mechanics ; Physics, Mathematical
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/25878
专题	力学所知识产出(1956-2008)
通讯作者	Meng, QS (reprint author), Taiyuan Univ Technol, China Educ Minist & Shanxi Provence, Key Lab Adv Mat & Interface Sci, Taiyuan 030024, Peoples R China.
推荐引用方式 GB/T 7714	Liu CR,Lu XY,Yang ZY,et al. Residual Stress And Deformation Analysis Of Anodic Bonded Multi-Layer Of Glass And Aluminum[J]. International Journal of Nonlinear Sciences and Numerical Simulation,2008:347-353.
APA	Liu CR,Lu XY,杨振宇,Meng QS,&Meng, QS .(2008).Residual Stress And Deformation Analysis Of Anodic Bonded Multi-Layer Of Glass And Aluminum.International Journal of Nonlinear Sciences and Numerical Simulation,347-353.
MLA	Liu CR,et al."Residual Stress And Deformation Analysis Of Anodic Bonded Multi-Layer Of Glass And Aluminum".International Journal of Nonlinear Sciences and Numerical Simulation (2008):347-353.

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