Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition

doi:10.1007/s11431-008-0096-7

IMECH-IR > 力学所知识产出(1956-2008)

	Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition
	Li SH(李帅辉); Shu YH(舒勇华); Fan J(樊菁); Fan, J (reprint author), Chinese Acad Sci, Inst Mech, Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
发表期刊	Science In China Series E-Technological Sciences
	2008
页码	1470-1482
ISSN	1006-9321
摘要	Thickness and component distributions of large-area thin films are an issue of international concern in the field of material processing. The present work employs experiments and direct simulation Monte Carlo (DSMC) method to investigate three-dimensional low-density, non-equilibrium jets of yttrium and titanium vapor atoms in an electron-beams physical vapor deposition (EBPVD) system furnished with two or three electron-beams, and obtains their deposition thickness and component distributions onto 4-inch and 6-inch mono-crystal silicon wafers. The DSMC results are found in excellent agreement with our measurements, such as evaporation rates of yttrium and titanium measured in-situ by quartz crystal resonators, deposited film thickness distribution measured by Rutherford backscattering spectrometer (RBS) and surface profilometer and deposited film molar ratio distribution measured by RBS and inductively coupled plasma atomic emission spectrometer (ICP-AES). This can be taken as an indication that a combination of DSMC method with elaborate measurements may be satisfactory for predicting and designing accurately the transport process of EBPVD at the atomic level.
关键词	Electron Beam Physical Vapor Deposition Thin Film Thickness And Species Distributions Vapor Atom Nonequilibrium Transport Monte-carlo-simulation Sphere Model Evaporation
DOI	10.1007/s11431-008-0096-7
收录类别	SCI
语种	英语
WOS记录号	WOS:000258286000016
关键词[WOS]	MONTE-CARLO-SIMULATION ; SPHERE MODEL ; EVAPORATION
WOS研究方向	Engineering ; Materials Science
WOS类目	Engineering, Multidisciplinary ; Materials Science, Multidisciplinary
引用统计	被引频次：6[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/25928
专题	力学所知识产出(1956-2008)
通讯作者	Fan, J (reprint author), Chinese Acad Sci, Inst Mech, Lab High Temp Gas Dynam, Beijing 100190, Peoples R China.
推荐引用方式 GB/T 7714	Li SH,Shu YH,Fan J,et al. Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition[J]. Science In China Series E-Technological Sciences,2008:1470-1482.
APA	李帅辉,舒勇华,樊菁,&Fan, J .(2008).Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition.Science In China Series E-Technological Sciences,1470-1482.
MLA	李帅辉,et al."Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition".Science In China Series E-Technological Sciences (2008):1470-1482.

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