Pull-In Instability Of Micro-Switch Actuators: Model Review

IMECH-IR > 力学所知识产出(1956-2008)

	Pull-In Instability Of Micro-Switch Actuators: Model Review
	Lin WH(林文惠); Zhao YP(赵亚溥); Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
发表期刊	International Journal of Nonlinear Sciences and Numerical Simulation
	2008
页码	175-183
ISSN	1565-1339
摘要	The existing three widely used pull-in theoretical models (i.e., one-dimensional lumped model, linear supposition model and planar model) are compared with the nonlinear beam mode in this paper by considering both cantilever and fixed-fixed type micro and nano-switches. It is found that the error of the pull-in parameters between one-dimensional lumped model and the nonlinear beam model is large because the denominator of the electrostatic force is minimal when the electrostatic force is computed at the maximum deflection along the beam. Since both the linear superposition model and the slender planar model consider the variation of electrostatic force with the beam's deflection, these two models not only are of the same type but also own little error of the pull-in parameters with the nonlinear beam model, the error brought by these two models attributes to that the boundary conditions are not completely satisfied when computing the numerical integration of the deflection.
关键词	Pull-in Micro And Nano-switches Error Estimation Theoretical Models Nanoscale Electrostatic Actuators Van-der-waals Variational Iteration Method Rf Mems Switches Torsional Actuators Microelectromechanical Systems Behavior Parameters Stability Forces
收录类别	SCI
语种	英语
WOS记录号	WOS:000257002700007
关键词[WOS]	NANOSCALE ELECTROSTATIC ACTUATORS ; VAN-DER-WAALS ; VARIATIONAL ITERATION METHOD ; RF MEMS SWITCHES ; TORSIONAL ACTUATORS ; MICROELECTROMECHANICAL SYSTEMS ; BEHAVIOR ; PARAMETERS ; STABILITY ; FORCES
WOS研究方向	Engineering ; Mathematics ; Mechanics ; Physics
WOS类目	Engineering, Multidisciplinary ; Mathematics, Applied ; Mechanics ; Physics, Mathematical
引用统计	被引频次：60[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/25980
专题	力学所知识产出(1956-2008)
通讯作者	Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Lin WH,Zhao YP,Zhao, YP . Pull-In Instability Of Micro-Switch Actuators: Model Review[J]. International Journal of Nonlinear Sciences and Numerical Simulation,2008:175-183.
APA	林文惠,赵亚溥,&Zhao, YP .(2008).Pull-In Instability Of Micro-Switch Actuators: Model Review.International Journal of Nonlinear Sciences and Numerical Simulation,175-183.
MLA	林文惠,et al."Pull-In Instability Of Micro-Switch Actuators: Model Review".International Journal of Nonlinear Sciences and Numerical Simulation (2008):175-183.

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