IMECH-IR  > 力学所知识产出(1956-2008)
Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip
Zhang Y(张吟); Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
Source PublicationJournal of Applied Mechanics-Transactions of the ASME
2008
ISSN0021-8936
AbstractThe curvature-stress relation is studied for a film-substrate bilayer with the effect of interfacial slip and compared with that of an ideal interface without interfacial slip. The interfacial slip together with the dimensions, elastic and interfacial properties of the film and substrate layers can cause a significant deviation of curvature-stress relation from that with an ideal interface. The interfacial slip also results in the so-called free edge effect that the stress, constraint force, and curvature vary dramatically around the free edges. The constant curvature as predicted by Stoney's formula and the Timoshenko model of an ideal interface is no longer valid for a bilayer with a nonideal interface. The models with the assumption of an ideal interface can also lead to an erroneous evaluation on the true stress state inside a bilayer with a nonideal interface. The extended Stoney's formula incorporating the effects of both the layer dimensions and interfacial slip is presented.
KeywordCompressed Elastic Film Thin-films Viscous Layer Wafer Fusion Stress Beam Semiconductors Technology Extension Adhesion
DOI10.1115/1.2745387
Indexed BySCI
Language英语
WOS IDWOS:000255132400008
WOS KeywordCOMPRESSED ELASTIC FILM ; THIN-FILMS ; VISCOUS LAYER ; WAFER FUSION ; STRESS ; BEAM ; SEMICONDUCTORS ; TECHNOLOGY ; EXTENSION ; ADHESION
WOS Research AreaMechanics
WOS SubjectMechanics
Citation statistics
Cited Times:16[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/26062
Collection力学所知识产出(1956-2008)
Corresponding AuthorZhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
Recommended Citation
GB/T 7714
Zhang Y,Zhang, Y . Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip[J]. Journal of Applied Mechanics-Transactions of the ASME,2008.
APA 张吟,&Zhang, Y .(2008).Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip.Journal of Applied Mechanics-Transactions of the ASME.
MLA 张吟,et al."Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip".Journal of Applied Mechanics-Transactions of the ASME (2008).
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