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Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip | |
Zhang Y(张吟); Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China. | |
Source Publication | Journal of Applied Mechanics-Transactions of the ASME |
2008 | |
ISSN | 0021-8936 |
Abstract | The curvature-stress relation is studied for a film-substrate bilayer with the effect of interfacial slip and compared with that of an ideal interface without interfacial slip. The interfacial slip together with the dimensions, elastic and interfacial properties of the film and substrate layers can cause a significant deviation of curvature-stress relation from that with an ideal interface. The interfacial slip also results in the so-called free edge effect that the stress, constraint force, and curvature vary dramatically around the free edges. The constant curvature as predicted by Stoney's formula and the Timoshenko model of an ideal interface is no longer valid for a bilayer with a nonideal interface. The models with the assumption of an ideal interface can also lead to an erroneous evaluation on the true stress state inside a bilayer with a nonideal interface. The extended Stoney's formula incorporating the effects of both the layer dimensions and interfacial slip is presented. |
Keyword | Compressed Elastic Film Thin-films Viscous Layer Wafer Fusion Stress Beam Semiconductors Technology Extension Adhesion |
DOI | 10.1115/1.2745387 |
Indexed By | SCI |
Language | 英语 |
WOS ID | WOS:000255132400008 |
WOS Keyword | COMPRESSED ELASTIC FILM ; THIN-FILMS ; VISCOUS LAYER ; WAFER FUSION ; STRESS ; BEAM ; SEMICONDUCTORS ; TECHNOLOGY ; EXTENSION ; ADHESION |
WOS Research Area | Mechanics |
WOS Subject | Mechanics |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://dspace.imech.ac.cn/handle/311007/26062 |
Collection | 力学所知识产出(1956-2008) |
Corresponding Author | Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China. |
Recommended Citation GB/T 7714 | Zhang Y,Zhang, Y . Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip[J]. Journal of Applied Mechanics-Transactions of the ASME,2008. |
APA | 张吟,&Zhang, Y .(2008).Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip.Journal of Applied Mechanics-Transactions of the ASME. |
MLA | 张吟,et al."Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip".Journal of Applied Mechanics-Transactions of the ASME (2008). |
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