Small scale, grain size and substrate effects in nano-indentation experiment of film-substrate systems

doi:10.1016/j.ijsolstr.2006.11.033

IMECH-IR > 力学所知识产出(1956-2008)

	Small scale, grain size and substrate effects in nano-indentation experiment of film-substrate systems
	Chen SH(陈少华); Liu L(刘磊); Wang ZQ(王自强); Chen, SH (reprint author), Chinese Acad Sci, Inst Mech, LNM, No 15 BeiSiHuan Xilu, Beijing 100080, Peoples R China.
发表期刊	International Journal of Solids and Structures
	2007
卷号	44 期号:13 页码:4492-4504
ISSN	0020-7683
摘要	The mechanical properties of film-substrate systems have been investigated through nano-indentation experiments in our former paper (Chen, S.H., Liu, L., Wang, T.C., 2005. Investigation of the mechanical properties of thin films by nano-indentation, considering the effects of thickness and different coating-substrate combinations. Surf. Coat. Technol., 191, 25-32), in which Al-Glass with three different film thicknesses are adopted and it is found that the relation between the hardness H and normalized indentation depth h/t, where t denotes the film thickness, exhibits three different regimes: (i) the hardness decreases obviously with increasing indentation depth; (ii) then, the hardness keeps an almost constant value in the range of 0.1-0.7 of the normalized indentation depth h/t; (iii) after that, the hardness increases with increasing indentation depth. In this paper, the indentation image is further investigated and finite element method is used to analyze the nano-indentation phenomena with both classical plasticity and strain gradient plasticity theories. Not only the case with an ideal sharp indenter tip but also that with a round one is considered in both theories. Finally, we find that the classical plasticity theory can not predict the experimental results, even considering the indenter tip curvature. However, the strain gradient plasticity theory can describe the experimental data very well not only at a shallow indentation depth but also at a deep depth. Strain gradient and substrate effects are proved to coexist in film-substrate nano-indentation experiments. (c) 2006 Elsevier Ltd. All rights reserved.
关键词	Nano-indentation Hardness Film-substrate System Classical Plasticity Theory Strain Gradient Plasticity Theory Indenter Tip Curvature Fem Strain Gradient Plasticity Depth-sensing Indentation Indenter Tip Radius Thin-films Length Scale Mechanical-properties Conventional Theory Deformation-theory Matrix Composites Single-crystals
DOI	10.1016/j.ijsolstr.2006.11.033
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000247414500014
关键词[WOS]	STRAIN GRADIENT PLASTICITY ; DEPTH-SENSING INDENTATION ; INDENTER TIP RADIUS ; THIN-FILMS ; LENGTH SCALE ; MECHANICAL-PROPERTIES ; CONVENTIONAL THEORY ; DEFORMATION-THEORY ; MATRIX COMPOSITES ; SINGLE-CRYSTALS
WOS研究方向	Mechanics
WOS类目	Mechanics
引用统计	被引频次：28[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/33963
专题	力学所知识产出(1956-2008)
通讯作者	Chen, SH (reprint author), Chinese Acad Sci, Inst Mech, LNM, No 15 BeiSiHuan Xilu, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Chen SH,Liu L,Wang ZQ,et al. Small scale, grain size and substrate effects in nano-indentation experiment of film-substrate systems[J]. International Journal of Solids and Structures,2007,44,13,:4492-4504.
APA	陈少华,刘磊,王自强,&Chen, SH .(2007).Small scale, grain size and substrate effects in nano-indentation experiment of film-substrate systems.International Journal of Solids and Structures,44(13),4492-4504.
MLA	陈少华,et al."Small scale, grain size and substrate effects in nano-indentation experiment of film-substrate systems".International Journal of Solids and Structures 44.13(2007):4492-4504.

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