Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading

doi:10.1109/JMEMS.2007.897090

IMECH-IR > 力学所知识产出(1956-2008)

	Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading
	Zhang Y(张吟); Wang YS; Li ZH; Huang YB; Li DC; Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
发表期刊	Journal of Microelectromechanical Systems
	2007
卷号	16 期号:3 页码:684-693
ISSN	1057-7157
摘要	The snap-through and pull-in instabilities of the micromachined arch-shaped beams under an electrostatic loading are studied both theoretically and experimentally. The pull-in instability that results in a system collision with an electrode substrate may lead to a system failure and, thus, limits the system maximum displacement. The beam/plate structure with a flat initial configuration under an electrostatic loading can only experience the pull-in instability. With the different arch configurations, the structure may experience either only the pull-in instability or the snap-through and pull-in instabilities together. As shown in our computation and experiment, those arch-shaped beams with the snap-through instability have the larger maximum displacement compared with the arch-shaped beams with only the pull-in stability and those with the flat initial configuration. The snap-through occurs by exerting a fixed load, and the structure experiences a discontinuous displacement jump without consuming power. Furthermore, after the snap-through jump, the structures are demonstrated to have the capacity to withstand further electrostatic loading without pull-in. Those properties of consuming no power and increasing the structure deflection range without pull-in is very useful in microelectromechanical systems design, which can offer better sensitivity and tuning range.
关键词	Actuators Beams Electrostatic Analysis Modeling Micromachined Beams Shallow Arches Bistable Mems Microactuator Parameters Actuators Stability Model
DOI	10.1109/JMEMS.2007.897090
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000247219200022
关键词[WOS]	MICROMACHINED BEAMS ; SHALLOW ARCHES ; BISTABLE MEMS ; MICROACTUATOR ; PARAMETERS ; ACTUATORS ; STABILITY ; MODEL
WOS研究方向	Engineering
WOS类目	Engineering, Electrical & Electronic ; Engineering, Mechanical
引用统计	被引频次：102[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/33967
专题	力学所知识产出(1956-2008)
通讯作者	Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Zhang Y,Wang YS,Li ZH,et al. Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading[J]. Journal of Microelectromechanical Systems,2007,16,3,:684-693.
APA	张吟,Wang YS,Li ZH,Huang YB,Li DC,&Zhang, Y .(2007).Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading.Journal of Microelectromechanical Systems,16(3),684-693.
MLA	张吟,et al."Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading".Journal of Microelectromechanical Systems 16.3(2007):684-693.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
E187.pdf（490KB）			开放获取	--	浏览下载