Parameter-estimation of a spherical top inductively-coupled plasma source with global-model

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	Parameter-estimation of a spherical top inductively-coupled plasma source with global-model
	Wu HM(吴汉明); Li M(李明); Chen YM(陈允明); Wu CK(吴承康); WU, BM (reprint author), ACAD SINICA,INST MECH,BEIJING 100080,PEOPLES R CHINA.
发表期刊	Chinese Physics Letters
	1995
卷号	12 期号:5 页码:281-284
ISSN	0256-307X
摘要	Using spatially averaged global model, we succeed in obtaining some plasma parameters for a low pressure inductively coupled plasma source of our laboratory. As far as the global balance is concerned, the models can give reasonable results of the parameters, such as the global electron temperature and the ion impacting energy, etc. It is found that the ion flow is hardly affected by the neutral gas pressure. Finally, the magnetic effects are calculated by means of the method. The magnetic field can play an important role to increase plasma density and ion current.
收录类别	SCI ; CSCD
语种	英语
WOS记录号	WOS:A1995RD43100007
WOS研究方向	Physics
WOS类目	Physics, Multidisciplinary
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/39232
专题	力学所知识产出(1956-2008)
通讯作者	WU, BM (reprint author), ACAD SINICA,INST MECH,BEIJING 100080,PEOPLES R CHINA.
推荐引用方式 GB/T 7714	Wu HM,Li M,Chen YM,et al. Parameter-estimation of a spherical top inductively-coupled plasma source with global-model[J]. Chinese Physics Letters,1995,12,5,:281-284.
APA	吴汉明,李明,陈允明,吴承康,&WU, BM .(1995).Parameter-estimation of a spherical top inductively-coupled plasma source with global-model.Chinese Physics Letters,12(5),281-284.
MLA	吴汉明,et al."Parameter-estimation of a spherical top inductively-coupled plasma source with global-model".Chinese Physics Letters 12.5(1995):281-284.

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