IMECH-IR  > 力学所知识产出(1956-2008)
Parameter-estimation of a spherical top inductively-coupled plasma source with global-model
Wu HM(吴汉明); Li M(李明); Chen YM(陈允明); Wu CK(吴承康); WU, BM (reprint author), ACAD SINICA,INST MECH,BEIJING 100080,PEOPLES R CHINA.
Source PublicationChinese Physics Letters
1995
Volume12Issue:5Pages:281-284
ISSN0256-307X
AbstractUsing spatially averaged global model, we succeed in obtaining some plasma parameters for a low pressure inductively coupled plasma source of our laboratory. As far as the global balance is concerned, the models can give reasonable results of the parameters, such as the global electron temperature and the ion impacting energy, etc. It is found that the ion flow is hardly affected by the neutral gas pressure. Finally, the magnetic effects are calculated by means of the method. The magnetic field can play an important role to increase plasma density and ion current.
Indexed BySCI
Language英语
WOS IDWOS:A1995RD43100007
WOS Research AreaPhysics
WOS SubjectPhysics, Multidisciplinary
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/39232
Collection力学所知识产出(1956-2008)
Corresponding AuthorWU, BM (reprint author), ACAD SINICA,INST MECH,BEIJING 100080,PEOPLES R CHINA.
Recommended Citation
GB/T 7714
Wu HM,Li M,Chen YM,et al. Parameter-estimation of a spherical top inductively-coupled plasma source with global-model[J]. Chinese Physics Letters,1995,12(5):281-284.
APA 吴汉明,李明,陈允明,吴承康,&WU, BM .(1995).Parameter-estimation of a spherical top inductively-coupled plasma source with global-model.Chinese Physics Letters,12(5),281-284.
MLA 吴汉明,et al."Parameter-estimation of a spherical top inductively-coupled plasma source with global-model".Chinese Physics Letters 12.5(1995):281-284.
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