IMECH-IR  > 力学所知识产出(1956-2008)
纳米硬度计及其在微机电系统中的应用
张泰华; 杨业敏
Source Publication现代科学仪器
2002-02-25
Issue1Pages:32-37
Abstract微机电系统 (MEMS)技术的迅速崛起 ,推动了对其所用材料和结构的力学性能研究。本文简要介绍纳米硬度技术的发展、理论模型和MTS公司的NanoIndenterXP系统的配置、测量原理及功能。并根据我们的一些研究结果 ,说明它在微机电系统中的应用
Keyword微机电系统 纳米压痕 纳米划痕
Language中文
Funding Organization国家自然科学基金资助项目 (批准号 :1 0 1 0 2 0 2 1和 1 0 1 72 0 86)
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/41940
Collection力学所知识产出(1956-2008)
Corresponding Author张泰华
Recommended Citation
GB/T 7714
张泰华,杨业敏. 纳米硬度计及其在微机电系统中的应用[J]. 现代科学仪器,2002(1):32-37
APA 张泰华,&杨业敏.(2002).纳米硬度计及其在微机电系统中的应用.现代科学仪器(1),32-37.
MLA 张泰华,et al."纳米硬度计及其在微机电系统中的应用".现代科学仪器 .1(2002):32-37.
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