IMECH-IR  > 力学所知识产出(1956-2008)
微机电系统多场耦合仿真分析
高行山; 赵亚溥; 吕胜利; 邓子辰
Source Publication动力学与控制学报
2004-02-15
Volume2Issue:1Pages:70-74
Abstract在微电子机械系统(MEMS)研究和设计中,微系统数值仿真分析是一个重要研究领域.本文对MEMS 中多种能量场耦合问题的各种数值仿真分析方法进行了综合评述.分析了该领域目前的研究现状并指出了其今后的发展方向.
Keyword微电子机械系统 能量场耦合 计算机辅助设计
Language中文
Funding Organization中科院力学研究所LNM资助项目(2003002).~~
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/42268
Collection力学所知识产出(1956-2008)
Corresponding Author高行山
Recommended Citation
GB/T 7714
高行山,赵亚溥,吕胜利,等. 微机电系统多场耦合仿真分析[J]. 动力学与控制学报,2004,2(1):70-74
APA 高行山,赵亚溥,吕胜利,&邓子辰.(2004).微机电系统多场耦合仿真分析.动力学与控制学报,2(1),70-74.
MLA 高行山,et al."微机电系统多场耦合仿真分析".动力学与控制学报 2.1(2004):70-74.
Files in This Item: Download All
File Name/Size DocType Version Access License
1138.pdf(396KB) 开放获取--View Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[高行山]'s Articles
[赵亚溥]'s Articles
[吕胜利]'s Articles
Baidu academic
Similar articles in Baidu academic
[高行山]'s Articles
[赵亚溥]'s Articles
[吕胜利]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[高行山]'s Articles
[赵亚溥]'s Articles
[吕胜利]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: 1138.pdf
Format: Adobe PDF
This file does not support browsing at this time
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.