IMECH-IR  > 力学所知识产出(1956-2008)
微机电系统多场耦合仿真分析
高行山; 赵亚溥; 吕胜利; 邓子辰
Source Publication动力学与控制学报
2004-02-15
Volume2Issue:1Pages:70-74
Abstract在微电子机械系统(MEMS)研究和设计中,微系统数值仿真分析是一个重要研究领域.本文对MEMS 中多种能量场耦合问题的各种数值仿真分析方法进行了综合评述.分析了该领域目前的研究现状并指出了其今后的发展方向.
Keyword微电子机械系统 能量场耦合 计算机辅助设计
Language中文
Funding Organization中科院力学研究所LNM资助项目(2003002).~~
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/42268
Collection力学所知识产出(1956-2008)
Corresponding Author高行山
Recommended Citation
GB/T 7714
高行山,赵亚溥,吕胜利,等. 微机电系统多场耦合仿真分析[J]. 动力学与控制学报,2004,2(1):70-74.
APA 高行山,赵亚溥,吕胜利,&邓子辰.(2004).微机电系统多场耦合仿真分析.动力学与控制学报,2(1),70-74.
MLA 高行山,et al."微机电系统多场耦合仿真分析".动力学与控制学报 2.1(2004):70-74.
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