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薄膜微区域变形的微标记阵列检测方法研究
Alternative TitleMicroregion Deformation Measurement of Thin Films Using Array Microindentation Mark Method
魏成; 李喜德; 黄静波; 施惠基; 张泰华
Source Publication光子学报
2005-05-25
Volume34Issue:5Pages:737-741
ISSN1004-4213
Abstract本文应用阵列微压痕标记技术完成了薄膜表面微孔洞缺陷邻域变形检测.检测中通过应用纳米压痕和微区域放电技术,制作微标记阵列和微孔洞缺陷,并在数字化显微系统下完成微区域点阵变形检测,进而实现微区域小变形测量.研究了微标记点的信息提取与表征方法,讨论了微标记法在薄膜材料性能检测中的可行性及其检测性能.
Keyword薄膜 微区域变形 微压痕 标记法 微缺陷
Indexed ByCSCD
Language中文
Funding Organization国家自然科学基金(10372049 ; 10072031 ; 10232030 )
CSCD IDCSCD:2028241
Citation statistics
Cited Times:1[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/42402
Collection力学所知识产出(1956-2008)
Corresponding Author魏成
Recommended Citation
GB/T 7714
魏成,李喜德,黄静波,等. 薄膜微区域变形的微标记阵列检测方法研究[J]. 光子学报,2005,34(5):737-741.
APA 魏成,李喜德,黄静波,施惠基,&张泰华.(2005).薄膜微区域变形的微标记阵列检测方法研究.光子学报,34(5),737-741.
MLA 魏成,et al."薄膜微区域变形的微标记阵列检测方法研究".光子学报 34.5(2005):737-741.
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