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AFM轻敲模式测量中由悬臂梁振幅反推针尖与样品相互作用力的方法
徐金明
Source Publication中国力学学会学术大会'2009论文摘要集.中国力学学会,2009,p.148
2009-08-24
Pages148
Conference Name中国力学学会学术大会'2009
Conference Date2009-08-24
Conference Place中国河南郑州
Abstract<正>原子力显微镜AFM的轻敲模式是测量软物体表面形貌的常用模式。但在测量过程中针尖与样品间的相互作用会使得测量形貌与真实形貌产生差异,包括样品变形的效应,不同轻敲振幅设置导致的不同形貌测量结果,样品与悬臂梁的耦合振动对测量信号产生的影响等。本文首先验证了伯努利梁模型在AFM轻敲模式下的适用性,
KeywordAfm 轻敲模式 伯努力梁模型 耦合振动 形貌修正
Language中文
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/43055
Collection非线性力学国家重点实验室
Corresponding Author徐金明
Recommended Citation
GB/T 7714
徐金明. AFM轻敲模式测量中由悬臂梁振幅反推针尖与样品相互作用力的方法[C]中国力学学会学术大会'2009论文摘要集.中国力学学会,2009,p.148,2009:148.
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