IMECH-IR  > 非线性力学国家重点实验室
Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading
Zhang Y(张吟); Wang YS; Li ZH; Zhang Y
Source PublicationMicrosystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems
2010
Volume16Issue:6Pages:909-918
ISSN0946-7076
AbstractAn arch-shaped beam with different configurations under electrostatic loading experiences either the direct pull-in instability or the snap-through first and then the pull-in instability. When the pull-in instability occurs, the system collides with the electrode and adheres to it, which usually causes the system failure. When the snap-through instability occurs, the system experiences a discontinuous displacement to flip over without colliding with the electrode. The snap-through instability is an ideal actuation mechanism because of the following reasons: (1) after snap-through the system regains the stability and capability of withstanding further loading; (2) the system flips back when the loading is reduced, i.e. the system can be used repetitively; and (3) when approaching snap-through instability the system effective stiffness reduces toward zero, which leads to a fast flipping-over response. To differentiate these two types of instability responses for an arch-shaped beam is vital for the actuator design. For an arch-shaped beam under electrostatic loading, the nonlinear terms of the mid-plane stretching and the electrostatic loading make the analytical solution extremely difficult if not impossible and the related numerical solution is rather complex. Using the one mode expansion approximation and the truncation of the higher-order terms of the Taylor series, we present an analytical solution here. However, the one mode approximation and the truncation error of the Taylor series can cause serious error in the solution. Therefore, an error-compensating mechanism is also proposed. The analytical results are compared with both the experimental data and the numerical multi-mode analysis. The analytical method presented here offers a simple yet efficient solution approach by retaining good accuracy to analyze the instability of an arch-shaped beam under electrostatic loading.
DOI10.1007/s00542-010-1031-y
URL查看原文
Indexed BySCI
Language英语
WOS IDWOS:000276975500001
WOS KeywordEQUIVALENT-CIRCUIT REPRESENTATION ; COMPUTER-AIDED GENERATION ; ORDER DYNAMIC MACROMODELS ; ELECTROMECHANICAL TRANSDUCERS ; PARAMETER SYSTEMS ; THIN-FILMS ; MODEL ; MICROACTUATOR ; CANTILEVER ; POLYMER
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
Funding OrganizationNational Natural Science Foundation of China (NSFC) [10721202] ; LNM ; Foundation of National Key Laboratory of Nano/Micro Fabrication Technology
Citation statistics
Cited Times:12[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/43519
Collection非线性力学国家重点实验室
Corresponding AuthorZhang Y
Recommended Citation
GB/T 7714
Zhang Y,Wang YS,Li ZH,et al. Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading[J]. Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems,2010,16(6):909-918.
APA 张吟,Wang YS,Li ZH,&Zhang Y.(2010).Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading.Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems,16(6),909-918.
MLA 张吟,et al."Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading".Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems 16.6(2010):909-918.
Files in This Item: Download All
File Name/Size DocType Version Access License
094.pdf(468KB) 开放获取--View Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[张吟]'s Articles
[Wang YS]'s Articles
[Li ZH]'s Articles
Baidu academic
Similar articles in Baidu academic
[张吟]'s Articles
[Wang YS]'s Articles
[Li ZH]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[张吟]'s Articles
[Wang YS]'s Articles
[Li ZH]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: 094.pdf
Format: Adobe PDF
This file does not support browsing at this time
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.