| Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading |
| Zhang Y(张吟) ; Wang YS; Li ZH; Zhang Y
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| 发表期刊 | Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems
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| 2010
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| 卷号 | 16期号:6页码:909-918 |
| ISSN | 0946-7076
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| 摘要 | An arch-shaped beam with different configurations under electrostatic loading experiences either the direct pull-in instability or the snap-through first and then the pull-in instability. When the pull-in instability occurs, the system collides with the electrode and adheres to it, which usually causes the system failure. When the snap-through instability occurs, the system experiences a discontinuous displacement to flip over without colliding with the electrode. The snap-through instability is an ideal actuation mechanism because of the following reasons: (1) after snap-through the system regains the stability and capability of withstanding further loading; (2) the system flips back when the loading is reduced, i.e. the system can be used repetitively; and (3) when approaching snap-through instability the system effective stiffness reduces toward zero, which leads to a fast flipping-over response. To differentiate these two types of instability responses for an arch-shaped beam is vital for the actuator design. For an arch-shaped beam under electrostatic loading, the nonlinear terms of the mid-plane stretching and the electrostatic loading make the analytical solution extremely difficult if not impossible and the related numerical solution is rather complex. Using the one mode expansion approximation and the truncation of the higher-order terms of the Taylor series, we present an analytical solution here. However, the one mode approximation and the truncation error of the Taylor series can cause serious error in the solution. Therefore, an error-compensating mechanism is also proposed. The analytical results are compared with both the experimental data and the numerical multi-mode analysis. The analytical method presented here offers a simple yet efficient solution approach by retaining good accuracy to analyze the instability of an arch-shaped beam under electrostatic loading. |
| DOI | 10.1007/s00542-010-1031-y
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| URL | 查看原文
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| 收录类别 | SCI
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| 语种 | 英语
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| WOS记录号 | WOS:000276975500001
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| 关键词[WOS] | EQUIVALENT-CIRCUIT REPRESENTATION
; COMPUTER-AIDED GENERATION
; ORDER DYNAMIC MACROMODELS
; ELECTROMECHANICAL TRANSDUCERS
; PARAMETER SYSTEMS
; THIN-FILMS
; MODEL
; MICROACTUATOR
; CANTILEVER
; POLYMER
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| WOS研究方向 | Engineering
; Science & Technology - Other Topics
; Materials Science
; Physics
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| WOS类目 | Engineering, Electrical & Electronic
; Nanoscience & Nanotechnology
; Materials Science, Multidisciplinary
; Physics, Applied
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| 项目资助者 | National Natural Science Foundation of China (NSFC) [10721202]
; LNM
; Foundation of National Key Laboratory of Nano/Micro Fabrication Technology
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| 引用统计 |
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| 文献类型 | 期刊论文
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| 条目标识符 | http://dspace.imech.ac.cn/handle/311007/43519
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| 专题 | 非线性力学国家重点实验室
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| 通讯作者 | Zhang Y |
推荐引用方式
GB/T 7714 |
Zhang Y,Wang YS,Li ZH,et al. Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading[J]. Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems,2010,16,6,:909-918.
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| APA |
张吟,Wang YS,Li ZH,&Zhang Y.(2010).Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading.Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems,16(6),909-918.
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| MLA |
张吟,et al."Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading".Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems 16.6(2010):909-918.
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