IMECH-IR  > 水动力学与海洋工程重点实验室(2009-2011)
高温MEMS剪应力传感器残余应力分析
Alternative TitleRESIDUAL STRESS IN HIGH TEMPERATURE MEMS SHEAR STRESS SENSOR
纪科星; 宋宏伟; 范学军
Source Publication力学与实践
2010
Volume32Issue:1Pages:60-63
ISSN1000-0879
Abstract采用理论分析与数值模拟相结合的方法, 研究了残余应力对静电反馈式MEMS高温剪应力传感器的结构设计的影响.研究表明:在电极宽度和间距不变的情况下, 增加电极数和减小电极长度可有效地减小由静电力引起的应力和变形;残余应力对结构应力和变形的影响远大于静电力
KeywordMems 剪应力传感器 残余应力 有限元
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Indexed ByCSCD
Language中文
Funding Organization总装备部预研基金项目 ; 国家自然科学基金资助(10502049)
CSCD IDCSCD:3934771
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Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/43944
Collection水动力学与海洋工程重点实验室(2009-2011)
Corresponding Author纪科星
Recommended Citation
GB/T 7714
纪科星,宋宏伟,范学军. 高温MEMS剪应力传感器残余应力分析[J]. 力学与实践,2010,32(1):60-63.
APA 纪科星,宋宏伟,&范学军.(2010).高温MEMS剪应力传感器残余应力分析.力学与实践,32(1),60-63.
MLA 纪科星,et al."高温MEMS剪应力传感器残余应力分析".力学与实践 32.1(2010):60-63.
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