IMECH-IR  > 先进制造工艺力学实验室
Si含量对CrAlSiN薄膜结构及摩擦性能的影响研究
陈支通
Thesis Advisor夏原
2011
Degree Grantor中国科学院研究生院
Place of Conferral北京
Subtype硕士
Degree Discipline工程力学
Call Number30845
Language中文
Document Type学位论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/44571
Collection先进制造工艺力学实验室
Recommended Citation
GB/T 7714
陈支通. Si含量对CrAlSiN薄膜结构及摩擦性能的影响研究[D]. 北京. 中国科学院研究生院,2011.
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