IMECH-IR  > 非线性力学国家重点实验室
原子力显微镜形貌测量偏差的机理分析及修正方法
Alternative TitleANALYSIS OF TOPOGRAPHY MEASUREMENT ERROR IN ATOMIC FORCE MICROSCOPE(AFM) AND ITS REVISION METHOD
徐金明; 白以龙
Source Publication力学学报
2011-01-18
Volume43Issue:1Pages:112-121
ISSN0459-1879 
Abstract采用原子力显微镜测量样品表面形貌时,针尖与样品间的相互作用力会使样品表面不同力学性质的区域变形量不同,从而使得形貌测量结果产生偏差.首先研究了引起形貌测量偏差的机理,进一步通过数值计算发现通过引入高频信号与低频信号叠加作为新的形貌测量信号可以近似避免这一类形貌测量偏差.但是对于普通的矩形截面悬臂梁提取高阶信号是比较困难的,通过外加弹簧的结构设计来调节悬臂梁各阶本征频率相对值,使得在实验测量过程中可以较方便地提取悬臂梁振动的高频信号
Other AbstractIn measuring topography of sample,the interaction between tip and sample will cause the deformation on the sample surface and the deformations will be different in the regions with different mechanical property.Furthermore,the deformations will cause non-negligible error in topography measurement.Theory analyses are carried out on this measurement error and further numerical research shows that mixed signals with high-frequency components are able to eliminate the measurement error.However,it is difficult to measure high-frequency signal for normal cantilever.In order to gain a proper high-frequency signal,a modified cantilever is introduced.The new designed cantilever can help us to adjust the relative values of eigen-frequencies of a cantilever and then enhance the high-frequency signal. 
KeywordAfm 形貌测量偏差 高频信号 结构设计 各阶本征频率相对值
Subject Area力学
URL查看原文
Indexed ByEI ; CSCD
Language中文
Funding Organization国家自然科学基金资助项目(10932011)~~
CSCD IDCSCD:4126884
DepartmentLNM材料的分子/细观统计力学行为
Classification二类
Citation statistics
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/44987
Collection非线性力学国家重点实验室
Corresponding Author徐金明
Recommended Citation
GB/T 7714
徐金明,白以龙. 原子力显微镜形貌测量偏差的机理分析及修正方法[J]. 力学学报,2011,43(1):112-121.
APA 徐金明,&白以龙.(2011).原子力显微镜形貌测量偏差的机理分析及修正方法.力学学报,43(1),112-121.
MLA 徐金明,et al."原子力显微镜形貌测量偏差的机理分析及修正方法".力学学报 43.1(2011):112-121.
Files in This Item: Download All
File Name/Size DocType Version Access License
C2011J172.pdf(989KB) 开放获取--View Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[徐金明]'s Articles
[白以龙]'s Articles
Baidu academic
Similar articles in Baidu academic
[徐金明]'s Articles
[白以龙]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[徐金明]'s Articles
[白以龙]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: C2011J172.pdf
Format: Adobe PDF
This file does not support browsing at this time
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.