Electrical insulation and bending properties of SiO(x) barrier layers prepared on flexible stainless steel foils by different preparing methods

doi:10.1016/j.tsf.2011.02.075

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	Electrical insulation and bending properties of SiO(x) barrier layers prepared on flexible stainless steel foils by different preparing methods
	Li YQ(李玉琼); Yu ZN; Leng J; Zhang DP; Chen S(陈涉); Jin G(靳刚); Jin, G (reprint author), Chinese Acad Sci, NML, Inst Mech, Beijing 100190, Peoples R China, Peoples R China
发表期刊	Thin Solid Films
	2011
卷号	519 期号:13 页码:4234-4238
ISSN	0040-6090
摘要	Stainless steel foils on which flexible display devices and integrated solar modules are prepared need to be coated by barrier layers for electrical insulation. In this study, SiO(x) barrier layer was prepared on steel foils (SUS 304) by ion beam assisted deposition, Sol gel deposition and plasma enhanced chemical vapor deposition, respectively. The electrical properties of the SiO(x) films, such as resistance, reactance, leakage current density, breakdown field strength and performance index were investigated, and the bending properties were evaluated by bending tests. The best electrical insulation and bending properties of barrier could be achieved with 4 mu m thick SiO(x) layer prepared by plasma enhanced chemical vapor deposition. (C) 2011 Elsevier B.V. All rights reserved.
关键词	Silicon Oxide Dielectric Barriers Electrical Insulation Bending Resistance Stainless Steel Foils Film Solar-cells Efficiency
学科领域	Materials Science ; Physics
DOI	10.1016/j.tsf.2011.02.075
URL	查看原文
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000290187100019
课题组名称	NML纳米生物光学
论文分区	二类/Q2
引用统计	被引频次：7[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/45088
专题	微重力重点实验室
通讯作者	Jin, G (reprint author), Chinese Acad Sci, NML, Inst Mech, Beijing 100190, Peoples R China, Peoples R China
推荐引用方式 GB/T 7714	Li YQ,Yu ZN,Leng J,et al. Electrical insulation and bending properties of SiO(x) barrier layers prepared on flexible stainless steel foils by different preparing methods[J]. Thin Solid Films,2011,519,13,:4234-4238.
APA	Li YQ.,Yu ZN.,Leng J.,Zhang DP.,Chen S.,...&Jin, G .(2011).Electrical insulation and bending properties of SiO(x) barrier layers prepared on flexible stainless steel foils by different preparing methods.Thin Solid Films,519(13),4234-4238.
MLA	Li YQ,et al."Electrical insulation and bending properties of SiO(x) barrier layers prepared on flexible stainless steel foils by different preparing methods".Thin Solid Films 519.13(2011):4234-4238.

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