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Electrical insulation and bending properties of SiO(x) barrier layers prepared on flexible stainless steel foils by different preparing methods
Li YQ(李玉琼); Yu ZN; Leng J; Zhang DP; Chen S(陈涉); Jin G(靳刚); Jin, G (reprint author), Chinese Acad Sci, NML, Inst Mech, Beijing 100190, Peoples R China, Peoples R China
Source PublicationThin Solid Films
2011
Volume519Issue:13Pages:4234-4238
ISSN0040-6090
AbstractStainless steel foils on which flexible display devices and integrated solar modules are prepared need to be coated by barrier layers for electrical insulation. In this study, SiO(x) barrier layer was prepared on steel foils (SUS 304) by ion beam assisted deposition, Sol gel deposition and plasma enhanced chemical vapor deposition, respectively. The electrical properties of the SiO(x) films, such as resistance, reactance, leakage current density, breakdown field strength and performance index were investigated, and the bending properties were evaluated by bending tests. The best electrical insulation and bending properties of barrier could be achieved with 4 mu m thick SiO(x) layer prepared by plasma enhanced chemical vapor deposition. (C) 2011 Elsevier B.V. All rights reserved.
KeywordSilicon Oxide Dielectric Barriers Electrical Insulation Bending Resistance Stainless Steel Foils Film Solar-cells Efficiency
Subject AreaMaterials Science ; Physics
DOI10.1016/j.tsf.2011.02.075
URL查看原文
Indexed BySCI ; EI
Language英语
WOS IDWOS:000290187100019
DepartmentNML纳米生物光学
Classification二类/Q2
Citation statistics
Cited Times:5[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/45088
Collection国家微重力实验室
Corresponding AuthorJin, G (reprint author), Chinese Acad Sci, NML, Inst Mech, Beijing 100190, Peoples R China, Peoples R China
Recommended Citation
GB/T 7714
Li YQ,Yu ZN,Leng J,et al. Electrical insulation and bending properties of SiO(x) barrier layers prepared on flexible stainless steel foils by different preparing methods[J]. Thin Solid Films,2011,519(13):4234-4238.
APA Li YQ.,Yu ZN.,Leng J.,Zhang DP.,Chen S.,...&Jin, G .(2011).Electrical insulation and bending properties of SiO(x) barrier layers prepared on flexible stainless steel foils by different preparing methods.Thin Solid Films,519(13),4234-4238.
MLA Li YQ,et al."Electrical insulation and bending properties of SiO(x) barrier layers prepared on flexible stainless steel foils by different preparing methods".Thin Solid Films 519.13(2011):4234-4238.
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