The YBCO film was grown on {001}LAO substrate by multi-phase electron beam-physical vapor deposition technology,and the texture and twin domain of the film were analyzed by the high resolution X-ray diffraction.The results showed that there were 8% C-oriented tetragonal crystalline besides orthorhombic in the film,and the orthorhombic crystalline consisted of 27% a-oriented,3% b-oriented and 62% C-oriented,meanwhile there were in-plane 90°±0.62°<110> twin domains in the C-oriented grain.The incomplete phase transition caused the tetragonal crystalline remaining.The main reasons of multi-orientations and twin domains existing in the orthorhombic crystalline were the local difference of micro environment,phase transition stress and anisotropy
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