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Energy fluctuations in a direct current plasma torch with inter-electrode inserts operated at reduced pressure
Huang HJ(黄河激); Pan WX(潘文霞); Wu CK(吴承康); Huang, HJ
Source PublicationPLASMA CHEMISTRY AND PLASMA PROCESSING
2012-02-01
Volume32Issue:1Pages:65-74
ISSN0272-4324
Abstract

Direct current (dc) plasma torch with inter-electrode inserts has the merits of fixed arc length, relative high enthalpy and may show advantages in future plasma processes where stability and controllability are must-have. Energy fluctuations in the plasma may result from power supply ripple, arc length variation, and/or acoustic oscillation. Using an improved power supply with a flat waveform, the characteristics of an argon plasma energy instabilities under reduced pressure were studied by means of simultaneously monitoring the arc voltage and arc current spectrum. Dependence of the arc fluctuation behavior on the plasma generating parameters, such as the current intensity, the plasma gas flow rates and the vacuum chamber pressure were investigated and discussed. Results show that the plasma torch has a typical U-shaped voltage-ampere characteristic (VAC). The correlation between the VAC and the probability of energy distributions was studied. Through pressure measurements at the cathode cavity and the vacuum chamber, the existence of sonic flow in the inter-electrode insert channel was confirmed.;Direct current (dc) plasma torch with inter-electrode inserts has the merits of fixed arc length, relative high enthalpy and may show advantages in future plasma processes where stability and controllability are must-have. Energy fluctuations in the plasma may result from power supply ripple, arc length variation, and/or acoustic oscillation. Using an improved power supply with a flat waveform, the characteristics of an argon plasma energy instabilities under reduced pressure were studied by means of simultaneously monitoring the arc voltage and arc current spectrum. Dependence of the arc fluctuation behavior on the plasma generating parameters, such as the current intensity, the plasma gas flow rates and the vacuum chamber pressure were investigated and discussed. Results show that the plasma torch has a typical U-shaped voltage-ampere characteristic (VAC). The correlation between the VAC and the probability of energy distributions was studied. Through pressure measurements at the cathode cavity and the vacuum chamber, the existence of sonic flow in the inter-electrode insert channel was confirmed.;Direct current (dc) plasma torch with inter-electrode inserts has the merits of fixed arc length, relative high enthalpy and may show advantages in future plasma processes where stability and controllability are must-have. Energy fluctuations in the plasma may result from power supply ripple, arc length variation, and/or acoustic oscillation. Using an improved power supply with a flat waveform, the characteristics of an argon plasma energy instabilities under reduced pressure were studied by means of simultaneously monitoring the arc voltage and arc current spectrum. Dependence of the arc fluctuation behavior on the plasma generating parameters, such as the current intensity, the plasma gas flow rates and the vacuum chamber pressure were investigated and discussed. Results show that the plasma torch has a typical U-shaped voltage-ampere characteristic (VAC). The correlation between the VAC and the probability of energy distributions was studied. Through pressure measurements at the cathode cavity and the vacuum chamber, the existence of sonic flow in the inter-electrode insert channel was confirmed.

Subject Area电磁流体力学和等离子体动力学 ; 电磁流体力学和等离子体动力学 ; 电磁流体力学和等离子体动力学
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Indexed BySCI ; EI
Language英语
WOS IDWOS:000304172300005
Funding OrganizationThis work is supported by the National Natural Science Foundation of China under Grant Nos. 11175226, 50836007 and 10921062. ; This work is supported by the National Natural Science Foundation of China under Grant Nos. 11175226, 50836007 and 10921062. ; This work is supported by the National Natural Science Foundation of China under Grant Nos. 11175226, 50836007 and 10921062.
DepartmentLHD应用等离子体力学(CPCR)
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Cited Times:5[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/46380
Collection高温气体动力学国家重点实验室
Corresponding AuthorHuang, HJ
Recommended Citation
GB/T 7714
Huang HJ,Pan WX,Wu CK,et al. Energy fluctuations in a direct current plasma torch with inter-electrode inserts operated at reduced pressure[J]. PLASMA CHEMISTRY AND PLASMA PROCESSING,2012,32(1):65-74.
APA Huang HJ,Pan WX,Wu CK,&Huang, HJ.(2012).Energy fluctuations in a direct current plasma torch with inter-electrode inserts operated at reduced pressure.PLASMA CHEMISTRY AND PLASMA PROCESSING,32(1),65-74.
MLA Huang HJ,et al."Energy fluctuations in a direct current plasma torch with inter-electrode inserts operated at reduced pressure".PLASMA CHEMISTRY AND PLASMA PROCESSING 32.1(2012):65-74.
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