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Effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 and stress control
Li YQ(李玉琼); Wang HQ; Wang WY; Yu ZN; Liu HS(刘河山); Jin G(靳刚); Jin, G
Source PublicationACTA MECHANICA SINICA
2012-10-01
Volume28Issue:5Pages:1382-1388
ISSN0567-7718
AbstractBased on Hartmann-Shack sensor technique, an online thin film stress measuring system was introduced to measure the film stresses of TiO2 and SiO2, and comparison was made between the film stresses prepared respectively by the conventional process and the ion-beam assisted deposition. The effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 was investigated in details, and the stress control methodologies using on-line adjustment and film doping were put forward. The results show that the film stress value of TiO2 prepared by ion-beam assisted deposition is 40 MPa lower than that prepared by conventional process, and the stress of TiO2 film changes gradually from tensile stress into compressive stress with increasing ion energy;while the film stress of SiO2 is a tensile stress under ion-beam assisted deposition because of the ion-beam sputtering effect, and the film refractive index decreases with increasing ion energy. A dynamic film stress control can be achieved through in-situ adjustment of the processing parameters based on the online film stress measuring technique, and the intrinsic stress of film can be effectively changed through film doping.
KeywordFilm Stress Stress Controlling Ion-beam Assisted Deposition Hartmann-shack Sensor Thin-films Residual-stress
Subject Area制造工艺力学
DOI10.1007/s10409-012-0146-z
URL查看原文
Indexed BySCI ; EI ; CSCD
Language英语
WOS IDWOS:000310884300018
WOS KeywordTHIN-FILMS; RESIDUAL-STRESS
WOS SubjectEngineering, Mechanical; Mechanics
DepartmentNML纳米生物光学
Classification二类
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Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/46583
Collection国家微重力实验室
Corresponding AuthorJin, G
Recommended Citation
GB/T 7714
Li YQ,Wang HQ,Wang WY,et al. Effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 and stress control[J]. ACTA MECHANICA SINICA,2012,28(5):1382-1388.
APA Li YQ.,Wang HQ.,Wang WY.,Yu ZN.,Liu HS.,...&Jin, G.(2012).Effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 and stress control.ACTA MECHANICA SINICA,28(5),1382-1388.
MLA Li YQ,et al."Effect of ion-beam assisted deposition on the film stresses of TiO2 and SiO2 and stress control".ACTA MECHANICA SINICA 28.5(2012):1382-1388.
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