Flexural contact in MEMS stiction

doi:10.1016/j.ijsolstr.2012.03.032

IMECH-IR > 非线性力学国家重点实验室

	Flexural contact in MEMS stiction
	Zhang, Yin; Zhao, Ya-pu; Zhang, Y; Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China.
发表期刊	INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES
	2012-09-01
卷号	49 期号:17 页码:2203-2214
ISSN	0020-7683
摘要	Adhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems (MEMS) device. The competition between the adhesive force and the beam restoring force determines whether the stiction occurs or not. Previous models assume that the stuck beam deforms either as the arc-shape or the S-shape, which causes significant differences in the measurements of adhesion and disputations among researchers. The contact mechanics model presented in this paper shows that the assumptions of the arc-shape and S-shape on the beam deformation over-simplify the problem;both the arc-shaped deformation and S-shaped deformation significantly deviate from the real ones. The previous theories are shown to be incompatible with the recent experimental results. The model presented in this paper attempts to explain those new experimental results and resolve some disputations on the previous models. The instabilities of jump-in during loading process and jump-off during unloading process are also incorporated in this model.; Adhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems (MEMS) device. The competition between the adhesive force and the beam restoring force determines whether the stiction occurs or not. Previous models assume that the stuck beam deforms either as the arc-shape or the S-shape, which causes significant differences in the measurements of adhesion and disputations among researchers. The contact mechanics model presented in this paper shows that the assumptions of the arc-shape and S-shape on the beam deformation over-simplify the problem; both the arc-shaped deformation and S-shaped deformation significantly deviate from the real ones. The previous theories are shown to be incompatible with the recent experimental results. The model presented in this paper attempts to explain those new experimental results and resolve some disputations on the previous models. The instabilities of jump-in during loading process and jump-off during unloading process are also incorporated in this model. (C) 2012 Elsevier Ltd. All rights reserved.
关键词	Stiction Contact Mechanics Mems Adhesion Arc-shape S-shape
学科领域	微机电系统中的固体力学问题
DOI	10.1016/j.ijsolstr.2012.03.032
URL	查看原文
收录类别	SCI
语种	英语
WOS记录号	WOS:000306206600001
关键词[WOS]	UNBONDED CONTACT ; STATIC FRICTION ; FINITE BEAM ; ADHESION ; MODEL ; MICROCANTILEVERS ; MECHANICS ; SURFACES ; FORCE ; TRANSITIONS
WOS研究方向	Mechanics
WOS类目	Mechanics
项目资助者	National Natural Science Foundation of China (NSFC)(11021262 ; The research has been supported by the National Natural Science Foundation of China (NSFC Nos. 11021262 and 11023001) and Chinese Academy of Sciences (Grant No. KJCX2-EW-L03). ; Chinese Academy of Sciences(KJCX2-EW-L03) ; 11023001)
课题组名称	LNM纳/微系统力学与物理力学
论文分区	一类/力学重要期刊
引用统计	被引频次：12[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/46694
专题	非线性力学国家重点实验室
通讯作者	Zhang, Y; Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China.
作者单位	Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Yin,Zhao, Ya-pu,Zhang, Y,et al. Flexural contact in MEMS stiction[J]. INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES,2012,49,17,:2203-2214.
APA	Zhang, Yin,Zhao, Ya-pu,Zhang, Y,&Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China..(2012).Flexural contact in MEMS stiction.INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES,49(17),2203-2214.
MLA	Zhang, Yin,et al."Flexural contact in MEMS stiction".INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES 49.17(2012):2203-2214.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
SCI-J2012-081.pdf（673KB）			开放获取	--	浏览下载