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Flexural contact in MEMS stiction
Zhang, Yin; Zhao, Ya-pu; Zhang, Y; Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China.
Source PublicationINTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES
2012-09-01
Volume49Issue:17Pages:2203-2214
ISSN0020-7683
AbstractAdhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems (MEMS) device. The competition between the adhesive force and the beam restoring force determines whether the stiction occurs or not. Previous models assume that the stuck beam deforms either as the arc-shape or the S-shape, which causes significant differences in the measurements of adhesion and disputations among researchers. The contact mechanics model presented in this paper shows that the assumptions of the arc-shape and S-shape on the beam deformation over-simplify the problem;both the arc-shaped deformation and S-shaped deformation significantly deviate from the real ones. The previous theories are shown to be incompatible with the recent experimental results. The model presented in this paper attempts to explain those new experimental results and resolve some disputations on the previous models. The instabilities of jump-in during loading process and jump-off during unloading process are also incorporated in this model.; Adhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems (MEMS) device. The competition between the adhesive force and the beam restoring force determines whether the stiction occurs or not. Previous models assume that the stuck beam deforms either as the arc-shape or the S-shape, which causes significant differences in the measurements of adhesion and disputations among researchers. The contact mechanics model presented in this paper shows that the assumptions of the arc-shape and S-shape on the beam deformation over-simplify the problem; both the arc-shaped deformation and S-shaped deformation significantly deviate from the real ones. The previous theories are shown to be incompatible with the recent experimental results. The model presented in this paper attempts to explain those new experimental results and resolve some disputations on the previous models. The instabilities of jump-in during loading process and jump-off during unloading process are also incorporated in this model. (C) 2012 Elsevier Ltd. All rights reserved.
KeywordStiction Contact Mechanics Mems Adhesion Arc-shape S-shape
Subject Area微机电系统中的固体力学问题
DOI10.1016/j.ijsolstr.2012.03.032
URL查看原文
Indexed BySCI
Language英语
WOS IDWOS:000306206600001
WOS KeywordUNBONDED CONTACT ; STATIC FRICTION ; FINITE BEAM ; ADHESION ; MODEL ; MICROCANTILEVERS ; MECHANICS ; SURFACES ; FORCE ; TRANSITIONS
WOS Research AreaMechanics
WOS SubjectMechanics
Funding OrganizationNational Natural Science Foundation of China (NSFC)(11021262 ; The research has been supported by the National Natural Science Foundation of China (NSFC Nos. 11021262 and 11023001) and Chinese Academy of Sciences (Grant No. KJCX2-EW-L03). ; Chinese Academy of Sciences(KJCX2-EW-L03) ; 11023001)
DepartmentLNM纳/微系统力学与物理力学
Classification一类/力学重要期刊
Citation statistics
Cited Times:10[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/46694
Collection非线性力学国家重点实验室
Corresponding AuthorZhang, Y; Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China.
AffiliationChinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China
Recommended Citation
GB/T 7714
Zhang, Yin,Zhao, Ya-pu,Zhang, Y,et al. Flexural contact in MEMS stiction[J]. INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES,2012,49(17):2203-2214.
APA Zhang, Yin,Zhao, Ya-pu,Zhang, Y,&Chinese Acad Sci, State Key Lab Nonlinear Mech, Inst Mech, Beijing 100190, Peoples R China..(2012).Flexural contact in MEMS stiction.INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES,49(17),2203-2214.
MLA Zhang, Yin,et al."Flexural contact in MEMS stiction".INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES 49.17(2012):2203-2214.
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