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Stiction of flexural MEMS structures
Liu Y; Zhang Y(张吟)
Conference Name3rd International Conference on Digital Manufacturing and Automation, ICDMA 2012
Conference DateAUG 01-02, 2012
Conference PlaceGuangxi, China
AbstractA variational method using the principle of virtual work (PVW) is presented to formulate the problem of the microcantilever stiction. Compared with the Rayleigh-Ritz method using the arc-shaped or S-shaped deflection, which prescribes the boundary conditions and thus the deflection shape of a stuck cantilever beam, the new method uses the matching conditions and constraint condition derived from PVW and minimization of the system free energy to describe the boundary conditions at the contact separation point. The transition of the beam deflection from an arc-shape-like one to an S-shape-like one with the increase of the beam length is shown by the new model. The (real) beam deflection given by this new model deviates more or less from either an arc-shape or an S-shape, which has significant impact on the interpretation of experimental data. The arc-shaped or S-shaped deflection assumption ignores the beam bending energy inside the contact area and the elastic energy due to the beam/substrate contact, which is inappropriate as shown by this study. Furthermore, the arc-shaped or S-shaped deflection only approximately describes the deflection shape of a stuck beam with zero external load and obviously, the external load changes the beam deflection. The Rayleigh-Ritz method using the arc-shaped or S-shaped deflection assumption in essence can only be used to tell approximately whether stiction occurs or not. Rather than assuming a certain deflection shape and by incorporating the external load, the new method offers a more general and accurate study not only on the microcantilever beam stiction but also on its de-adherence. (C) (2012) Trans Tech Publications, Switzerland.
KeywordAdhesion Boundary Conditions Composite Micromechanics Manufacture Stiction Variational Techniques Beam Bending Beam Deflection Beam Length Constraint Conditions Contact Areas Contact Separation Elastic Energy External Loads Matching Condition Mems-structure Micro-cantilevers Microcantilever Beams Principle Of Virtual Work Rayleigh-ritz Methods s Shape S-shaped Significant Impacts Variational Methods
WOS IDWOS:000311978100167
Funding OrganizationNational Natural Science Foundation of China (NSFC) 11021262 11023001 Chinese Academy of Sciences KJCX2-EW-L03
Indexed ByCPCI-S ; EI
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Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type会议论文
Corresponding AuthorLiu Y
Recommended Citation
GB/T 7714
Liu Y,Zhang Y. Stiction of flexural MEMS structures[C]DIGITAL MANUFACTURING AND AUTOMATION III,2012:794-800.
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