IMECH-IR  > 非线性力学国家重点实验室
Fast deposition of diamond-like carbon films by radio frequency hollow cathode method
Pang XL; Peng HL; Yang HS; Gao KW; Wu XL(武晓雷); Volinsky AA; Yang, HS (reprint author), Univ Sci & Technol Beijing, Dept Mat Phys & Chem, Beijing 100083, Peoples R China.
Source PublicationTHIN SOLID FILMS
2013-05-01
Volume534Pages:226-230
ISSN0040-6090
AbstractDiamond-like carbon (DLC) thin films were deposited on p-type Si (100) substrates by RF hollow cathode method under different RF power and pressure, using ethane as the precursor gas. The deposition rate of 45 nm/min was achieved, almost 4 times higher than by conventional radio frequency plasma enhanced chemical vapor deposition. The mechanism of fast DLC films deposition is attributed to high plasma density in RF hollow cathode method, discussed in this paper. Scanning electron microscopy and Raman spectroscopy were used to investigate the microstructure of DLC films. The film hardness and Young's modulus were measured by nanoindentation.
KeywordDiamond-like Carbon Films Hollow Cathode Deposition Rate Raman Spectra Nanohardness
Subject Area固体力学
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Indexed BySCI ; EI
Language英语
WOS IDWOS:000317736700038
Funding OrganizationNational Nature Science Foundation of China [51001013, 51271022]; Fok Ying Tung Education Foundation [132001]; Fundamental Research Funds for the Central Universities
DepartmentLNM材料介观力学性能的表征
Classification二类/Q2
Citation statistics
Cited Times:13[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/47262
Collection非线性力学国家重点实验室
Corresponding AuthorYang, HS (reprint author), Univ Sci & Technol Beijing, Dept Mat Phys & Chem, Beijing 100083, Peoples R China.
Recommended Citation
GB/T 7714
Pang XL,Peng HL,Yang HS,et al. Fast deposition of diamond-like carbon films by radio frequency hollow cathode method[J]. THIN SOLID FILMS,2013,534:226-230.
APA Pang XL.,Peng HL.,Yang HS.,Gao KW.,Wu XL.,...&Yang, HS .(2013).Fast deposition of diamond-like carbon films by radio frequency hollow cathode method.THIN SOLID FILMS,534,226-230.
MLA Pang XL,et al."Fast deposition of diamond-like carbon films by radio frequency hollow cathode method".THIN SOLID FILMS 534(2013):226-230.
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