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Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies
Zhang Y(张吟); Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
Source PublicationSensors and Actuators A-Physical
2013-05-01
Volume194Pages:169-175
ISSN0924-4247
AbstractThe adsorption-induced surface stress and mass can cause the resonant frequency shifts of a microcantilever, which is used as the sensing mechanism for a resonator sensor. Determining the adsorption-induced surface stress and mass from the experimentally measured data of resonant frequencies forms an inverse problem. Because there are infinite combinations of surface stress and mass which can result in the same change of one resonant frequency, the previous studies usually measure surface stress or mass by one measurement method and then find the other by another different measurement method. This study shows that surface stress and mass have different impacts on the resonant frequencies of a microcantilever. Two resonant frequencies are used to uniquely determine the adsorption-induced surface stress and mass. Mathematically, the new method presented in this study provides an efficient and straightforward solution to the inverse problem and its accuracy is also demonstrated. Physically, the new method only requires the dynamic mode to measure the resonant frequencies, which should be of a great help to various sensor applications.
KeywordSurface Stress Resonant Frequencies Adsorption Resonator Sensor
Subject Area微机电系统中的固体力学问题
DOI10.1016/j.sna.2013.01.029
URL查看原文
Indexed BySCI ; EI
Language英语
WOS IDWOS:000319306800021
Funding OrganizationNational Natural Science Foundation of China (NSFC) [110212622, 11023001]; Chinese Academy of Sciences [KJCX2-EW-L03]
DepartmentLNM纳/微系统力学与物理力学
Classification二类/Q1
Citation statistics
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/47322
Collection非线性力学国家重点实验室
Corresponding AuthorZhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
Recommended Citation
GB/T 7714
Zhang Y,Zhang, Y . Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies[J]. Sensors and Actuators A-Physical,2013,194:169-175.
APA Zhang Y,&Zhang, Y .(2013).Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies.Sensors and Actuators A-Physical,194,169-175.
MLA Zhang Y,et al."Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies".Sensors and Actuators A-Physical 194(2013):169-175.
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