IMECH-IR  > 力学所知识产出(1956-2008)
ECR等离子体源中磁场梯度的影响
邵福球; 王龙; 姚鑫兹; 吴汉明
Source Publication信息科学与微电子技术:中国科协第三届青年学术年会论文集
1998
Pages231-233
Conference Name】“科技增强国力,青年开创未来——携手走向辉煌的新世纪”中国科协第三届青年学术年会
Conference Date1998-8-20
Conference Place中国中国北京
Abstract用混合模型在二维位形空间和三维速度空间对电子回旋共振等离子体源中的粒子运动进行数值模拟,并着重研究磁场梯度在电子回旋共振等离子体源中所起的作用。结果显示磁场梯度增加时,电子温度、等离子体密度和离化率降低,而等离子体势和离子的能量增加。模拟中观测到一个θ方向不为零的平均速度,这是由于E×B和▽n_1×B漂移所引起的。
Keyword电子回旋共振 等离子体源 数值模拟
Department力学所
Language中文
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/48092
Collection力学所知识产出(1956-2008)
Recommended Citation
GB/T 7714
邵福球,王龙,姚鑫兹,等. ECR等离子体源中磁场梯度的影响[C]信息科学与微电子技术:中国科协第三届青年学术年会论文集,1998:231-233.
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