IMECH-IR  > 力学所知识产出(1956-2008)
微电子机械系统的计算机辅助设计
孙克豪; 胡宇群; 王立森; 赵亚溥
Source Publication“力学2000”学术大会论文集
2000
Pages621-622
Conference Name“力学2014”学术大会
Conference Date2000-8-1
Conference Place中国北京
Abstract概要论述了微电子机械系统的计算机辅助设计。分析了MEMS CAD系统所应具有的主要内容和系统模拟中的关键问题。采用基于能量的方法构造可取代全三维完整模拟的低阶分析宏模型来近似表示静电致动微系统结构变形,使微系统的计算机辅助设计和仿真模拟系统更易于实现。
Keyword微电子机械系统 计算机辅助设计 模拟 低阶动态宏模型
Department力学所
Language中文
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/48117
Collection力学所知识产出(1956-2008)
Recommended Citation
GB/T 7714
孙克豪,胡宇群,王立森,等. 微电子机械系统的计算机辅助设计[C]“力学2000”学术大会论文集,2000:621-622.
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