IMECH-IR  > 流固耦合系统力学重点实验室
单晶硅激光冲击强化研究
柳沅汛; 吴先前; 王曦; 黄晨光
Source Publication第十二届全国物理力学学术会议论文摘要集
2012
Pages8-8
Conference Name第十二届全国物理力学学术会议
Conference Date2012-11-12
Conference Place中国广西桂林
Abstract将P型晶向的单晶硅加热到一定温度,利用强激光诱导的冲击波对其进行强化处理。采用光学显微镜观察了激光冲击强化处理后单晶硅的表面形貌,采用显微拉曼光谱仪测量了单晶硅表面的残余应力。结果表明:随着温度的升高,激光冲击后单晶硅冲击区的裂纹变小,表面质量提高;在高温下进行激光冲击后硅片表面可以产生百兆帕量级的残余压应力,单晶硅发生了较大的塑性变形;随着激光功率密度的增加,单晶硅冲击区的表面质量、残余压应力先提高后下降,说明高温下对单晶硅进行激光冲击处理时激光功率密度存在优化窗口。随着温度、激光功率密度的改变,单晶硅表面质量、残余应力发生了改变,其变化规律反映了单晶硅在激光冲击作用下变形机制的转...
Keyword激光冲击强化 单晶硅 塑性变形 表面质量 残余应力
DepartmentLMFS冲击与耦合效应(LHO)
Language中文
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/48428
Collection流固耦合系统力学重点实验室
Recommended Citation
GB/T 7714
柳沅汛,吴先前,王曦,等. 单晶硅激光冲击强化研究[C],2012:8-8.
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