IMECH-IR  > 高温气体动力学国家重点实验室
康铜薄膜热流传感器的电子束物理气相沉积
舒勇华; 吴松; 李进平; 樊菁
Source Publication中国力学大会——2013论文摘要集
2013
Conference Name中国力学大会——2013
Conference Date2013-08-19
Conference Place中国北京
Abstract为满足激波风洞试验的高频响和高精度要求,研制了一种新型的康铜薄膜整体式热电偶测热传感器,以双组元电子束物理气相沉积的方法制备了热电偶的康铜薄膜热接点层,并精确控制热接点层厚度。与传统的测热传感器相比,其空间分辨率更高,敏感元件的尺寸小至直径0.1 mm,可用于测量R0.5 mm的尖锥驻点热流。风洞试验
Keyword热流传感器 薄膜 康铜 热传感器 热电偶 热接点 重复性误差 驻点 敏感元件 高频响 空间分辨率 风洞试验 层厚度 激波风洞 整体式 测量精度 精度要求 验证结果 尖锥 双组元:0
DepartmentLHD微尺度和非平衡流动
Language中文
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/48564
Collection高温气体动力学国家重点实验室
Recommended Citation
GB/T 7714
舒勇华,吴松,李进平,等. 康铜薄膜热流传感器的电子束物理气相沉积[C]中国力学大会——2013论文摘要集,2013.
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