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Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam
Zhang Y(张吟); Zhao YP(赵亚溥); Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
Source PublicationMICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
2015-04
Volume21Issue:4Pages:919-929
ISSN0946-7076
AbstractThe competition between the adhesive force and the beam restoring force determines the stiction shape of a microbeam. The presence of residual stress changes the beam stiffness and thus leads to the change of the beam restoring force. This study presents a model of incorporating the residual stress effect for the beam stiction. The previous models of arc-shape and S-shape correspond to the zero residual stress case, which also prescribes the stiction shape. When the residual stress becomes large, arc-shape and S-shape significantly deviate from the actual stiction shape of a slender beam. With the assumed stiction shape of arc-shape and S-shape, suspension length is the only parameter needed to characterize the stiction shape and suspension length can also be used to uniquely determine the adhesion energy. However, there are infinite combinations of residual stress and adhesion energy which can result in the same suspension length. Besides suspension length, the beam rise above the substrate can also be used as a parameter to characterize the stiction shape. This study presents a method of using these two parameters to uniquely determine the residual stress and adhesion energy as an inverse problem. A computation technique of using the stiction shape symmetry to significantly reduce the computation is also demonstrated.
Subject AreaEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
DOI10.1007/s00542-014-2127-6
URL查看原文
Indexed BySCI ; EI
Language英语
WOS IDWOS:000351279200023
WOS KeywordMICROELECTROMECHANICAL SYSTEMS ; CONTACT ; CANTILEVER ; BEAM ; MEMS ; MECHANICS ; MODEL ; FILM ; MICROCANTILEVERS ; FOUNDATION
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
Funding OrganizationNational Natural Science Foundation of China (NSFC) [11023001, 11372321]
DepartmentLNM纳/微系统力学与物理力学
ClassificationQ3
Citation statistics
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/49904
Collection非线性力学国家重点实验室
Corresponding AuthorZhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
Recommended Citation
GB/T 7714
Zhang Y,Zhao YP,Zhang, Y . Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2015,21(4):919-929.
APA 张吟,赵亚溥,&Zhang, Y .(2015).Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,21(4),919-929.
MLA 张吟,et al."Determining both adhesion energy and residual stress by measuring the stiction shape of a microbeam".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 21.4(2015):919-929.
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