IMECH-IR  > 力学所知识产出(1956-2008)
DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS
Wang XB(王小保); Qian J(钱劲); Zhang DC(张大成)
Source PublicationActa Mechanica Sinica
2004
Issue2Pages:152-158
ISSN0567-7749
AbstractMicromachined piezoresistive flowmeters with four different types of sensing struc-tures have been designed,fabricated and tested.Piezoresistors were defined at the end of the sensorsthrough p-diffusion,and their values were about 3.5kΩ.Wheatstone bridge was configured with thepiezoresistors in ...
KeywordMicromachined Flowmeters Bulk-micromachining Piezoresistivity Wheatstone Bridge
Indexed BySCI ; EI ; CSCD
Language英语
WOS IDWOS:000221518600007
WOS Research AreaEngineering ; Mechanics
WOS SubjectEngineering, Mechanical ; Mechanics
Funding OrganizationThe project supported by the National “973” Project (TG1999033108) ; the National Natural Science Foundation of China (19928205,50131160739 and 10072068)
Citation statistics
Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/55154
Collection力学所知识产出(1956-2008)
Recommended Citation
GB/T 7714
Wang XB,Qian J,Zhang DC. DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS[J]. Acta Mechanica Sinica,2004(2):152-158.
APA 王小保,钱劲,&张大成.(2004).DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS.Acta Mechanica Sinica(2),152-158.
MLA 王小保,et al."DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS".Acta Mechanica Sinica .2(2004):152-158.
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