DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS

IMECH-IR > 力学所知识产出(1956-2008)

	DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS
	Wang XB(王小保); Qian J(钱劲); Zhang DC(张大成)
发表期刊	Acta Mechanica Sinica
	2004
期号	2 页码:152-158
ISSN	0567-7749
摘要	Micromachined piezoresistive flowmeters with four different types of sensing struc-tures have been designed,fabricated and tested.Piezoresistors were defined at the end of the sensorsthrough p-diffusion,and their values were about 3.5kΩ.Wheatstone bridge was configured with thepiezoresistors in ...
关键词	Micromachined Flowmeters Bulk-micromachining Piezoresistivity Wheatstone Bridge
收录类别	SCI ; EI ; CSCD
语种	英语
WOS记录号	WOS:000221518600007
WOS研究方向	Engineering ; Mechanics
WOS类目	Engineering, Mechanical ; Mechanics
项目资助者	The project supported by the National “973” Project (TG1999033108) ; the National Natural Science Foundation of China (19928205,50131160739 and 10072068)
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/55154
专题	力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Wang XB,Qian J,Zhang DC. DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS[J]. Acta Mechanica Sinica,2004,2,:152-158.
APA	王小保,钱劲,&张大成.(2004).DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS.Acta Mechanica Sinica(2),152-158.
MLA	王小保,et al."DESIGN,FABRICATION,TESTING AND MECHANICAL ANALYSIS OF BULK-MICROMACHINED FLOWMETERS".Acta Mechanica Sinica .2(2004):152-158.

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