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Quantitative analysis of oxygen content in copper oxide films using ultra microbalance
Shu YH(舒勇华); Liu C(刘崇); Wang LH(王连红); Fan J(樊菁)
Source PublicationProceedings of 29th International Symposium on Rarefied Gas Dynamics
2014
Conference NameThe 29th International Symposium on Rarefied Gas Dynamics
Conference Date2014-07-13
Conference Place中国陕西西安
AbstractThe oxygen content is one of the key factors that determine the property of the functional oxide films,and it is important to detect the oxygen content accurately.In this article,we try to analyze the oxygen content in copper oxide films using ultra microbalance.The Copper oxide films were prepar...
KeywordQuartz Chamber Minutes Heated Vacuum
DepartmentLHD微尺度和非平衡流动
URL查看原文
Language英语
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/55208
Collection高温气体动力学国家重点实验室
Recommended Citation
GB/T 7714
Shu YH,Liu C,Wang LH,et al. Quantitative analysis of oxygen content in copper oxide films using ultra microbalance[C]Proceedings of 29th International Symposium on Rarefied Gas Dynamics,2014.
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