Quantitative analysis of oxygen content in copper oxide films using ultra microbalance | |
Shu YH(舒勇华); Liu C(刘崇); Wang LH(王连红); Fan J(樊菁) | |
Source Publication | Proceedings of 29th International Symposium on Rarefied Gas Dynamics |
2014 | |
Conference Name | The 29th International Symposium on Rarefied Gas Dynamics |
Conference Date | 2014-07-13 |
Conference Place | 中国陕西西安 |
Abstract | The oxygen content is one of the key factors that determine the property of the functional oxide films,and it is important to detect the oxygen content accurately.In this article,we try to analyze the oxygen content in copper oxide films using ultra microbalance.The Copper oxide films were prepar... |
Keyword | Quartz Chamber Minutes Heated Vacuum |
Department | LHD微尺度和非平衡流动 |
URL | 查看原文 |
Language | 英语 |
Document Type | 会议论文 |
Identifier | http://dspace.imech.ac.cn/handle/311007/55208 |
Collection | 高温气体动力学国家重点实验室 |
Recommended Citation GB/T 7714 | Shu YH,Liu C,Wang LH,et al. Quantitative analysis of oxygen content in copper oxide films using ultra microbalance[C]Proceedings of 29th International Symposium on Rarefied Gas Dynamics,2014. |
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