IMECH-IR  > 非线性力学国家重点实验室
Adhesion-Induced Failure of the Slender MEMS Structures
Liu Y; Zhang Y(张吟); liuyunkm@126.com; zhangyin@lnm.imech.ac.cn
Source PublicationINTERNATIONAL CONFERENCE ON MECHANICAL DESIGN MANUFACTURE AND AUTOMATION ENGINEERING
2014
Conference NameInternational Conference on Mechanical Design Manufacture and Automation Engineering
Conference DateJAN 11-12 2014
Conference PlacePhuket THAILAND
AbstractAdhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems device. The contact mechanics model presented in this paper shows that the assumptions of the arc-shape and S-shape on the beam deformation over-simplify the problem; both the arc-shaped deformation and S-shaped deformation significantly deviate from the real ones. The previous theories are shown to be incompatible with the recent experimental results. The model presented in this paper attempts to explain those new experimental results and resolves some disputations on the previous models.
KeywordAdhesion Stiction S-shape Arc-shape
DepartmentLNM纳/微系统力学与物理力学
Indexed ByCPCI
Language英语
Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/55361
Collection非线性力学国家重点实验室
Corresponding Authorliuyunkm@126.com; zhangyin@lnm.imech.ac.cn
Recommended Citation
GB/T 7714
Liu Y,Zhang Y,liuyunkm@126.com,et al. Adhesion-Induced Failure of the Slender MEMS Structures[C]. LANCASTER:DESTECH PUBLICATIONS INC,2014.
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