Application of Flow-Kinetics Model To the Pvt Growth of Sic Crystals

doi:10.1016/j.jcrysgro.2006.11.186

IMECH-IR > 力学所知识产出(1956-2008)

	Application of Flow-Kinetics Model To the Pvt Growth of Sic Crystals
	Chen QS(陈启生); Yan JY(颜君毅); Prasad V; Chen, QS (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan Xi Rd, Beijing 100080, Peoples R China.
发表期刊	JOURNAL OF CRYSTAL GROWTH
	2007
卷号	303 期号:1 页码:357-361
ISSN	0022-0248
摘要	A 2-D flow-kinetics model for the PVT growth has been used to describe the phenomena of multi-phase flow, mass transfer and kinetics in the growth process of SiC crystals. The model couples the 2-D gas flow calculations and the growth kinetics at the crystal interface. We calculated the axisymmetric flow field and species concentration field as well as growth rate profile by a finite volume-based code. Species transfer in the cavity is dominated by the diffusion at growth pressures of 8-14 kPa. Supersaturation at the crystal interface is less than 1 Pa at growth pressures of 8-14 kPa. (c) 2006 Elsevier B.V. All rights reserved.
关键词	Fluid Flows Growth Models Growth From Vapor Single-crystal Growth Semiconducting Silicon Compounds
DOI	10.1016/j.jcrysgro.2006.11.186
收录类别	SCI
语种	英语
WOS记录号	WOS:000246386900066
关键词[WOS]	PHYSICAL-VAPOR TRANSPORT ; SILICON-CARBIDE CRYSTALS ; SUBLIMATION GROWTH ; BULK CRYSTAL ; HEAT-TRANSFER
WOS研究方向	Crystallography ; Materials Science ; Physics
WOS类目	Crystallography ; Materials Science, Multidisciplinary ; Physics, Applied
引用统计	被引频次：9[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/58444
专题	力学所知识产出(1956-2008)
通讯作者	Chen, QS (reprint author), Chinese Acad Sci, Inst Mech, 15 Bei Si Huan Xi Rd, Beijing 100080, Peoples R China.
推荐引用方式 GB/T 7714	Chen QS,Yan JY,Prasad V,et al. Application of Flow-Kinetics Model To the Pvt Growth of Sic Crystals[J]. JOURNAL OF CRYSTAL GROWTH,2007,303,1,:357-361.
APA	陈启生,颜君毅,Prasad V,&Chen, QS .(2007).Application of Flow-Kinetics Model To the Pvt Growth of Sic Crystals.JOURNAL OF CRYSTAL GROWTH,303(1),357-361.
MLA	陈启生,et al."Application of Flow-Kinetics Model To the Pvt Growth of Sic Crystals".JOURNAL OF CRYSTAL GROWTH 303.1(2007):357-361.

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