29th International Symposium on Rarefi ed Gas Dynamics (RGD)
会议日期
JUL 13-18, 2014
会议地点
Xian, PEOPLES R CHINA
摘要
YBa2Cu3O7-delta precursor films are deposited on 2 '' LaAlO3 wafer by the co-evaporation technique using Y, BaF2 and Cu as evaporation sources. After deposition, the films are annealed at low-pressure atmosphere with the composition of oxygen and water vapour. Compared with the normal pressure annealing, it is shown that low pressure can greatly improve the superconducting properties of 2 '' YBCO films with thickness larger than 500 nm, as the microcrack on films surface becomes unobservable the microwave surface resistance is greatly reduced. Furthermore, it is also revealed that the optimal processing window for making high quality superconducting YBCO films through ex-situ process is relatively small, therefore the ambient in annealing furnace is crucial important and should be precisely controlled.
Wang LH,Liu C,Fan J,et al. YBa2Cu3O7-delta Superconducting Films Prepared by Low Pressure Post-annealing[C]PROCEEDINGS OF THE 29TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS,2014.
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