IMECH-IR  > 力学所知识产出(1956-2008)
Thickness and component distributions of yttrium-titanium alloy films in multi-electron-beam physical vapor deposition
Li SH(李帅辉); Shu YH(舒勇华); Fan J(樊菁)
Source PublicationProceedings of the 8th Vacuum Metallurgy and Surface Engineering
2007
Conference Namethe 8th Vacuum Metallurgy and Surface Engineering
Conference DateJUN 16-19, 2007
Conference PlaceShenyang, PEOPLES R CHINA
Abstract

Thickness and component distributions of large-area thin films are an issue of international concern in the field of material processing. The present work employs experiments and direct simulation Monte Carlo (DSMC) method to investigate three-dimensional low-density, non-equilibrium jets of yttrium and titanium vapor atoms in an electron-beams physical vapor deposition (EBPVD) system furnished with two or three electron-beams, and obtains their deposition thickness and component distributions onto 4-Inch and 6-inch mono-crystal silicon wafers. The DSMC results are found in excellent agreement with our measurements, such as evaporation rates of yttrium and titanium measured in-situ by quartz crystal resonators, deposited film thickness distribution measured by Rutherford backscattering spectrometer (RBS) and surface profilometer and deposited film molar ratio distribution measured by RBS and inductively coupled plasma atomic emission spectrometer (ICP-AES). This can be taken as an indication that a combination of DSMC method with elaborate measurements may be satisfactory for predicting and designing accurately the transport process of EBPVD at the atomic level.

KeywordElectron Beam Physical Vapor Deposition Thin Film Thickness And Species Distributions Vapor Atom Non-equilibrium Transport Keywords Plus:Monte-carlo-simulation Sphere Model Evaporation
WOS IDWOS:000248081800036
ISBN978-7-121-04043-6
Indexed ByCPCI
Language英语
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Document Type会议论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/58896
Collection力学所知识产出(1956-2008)
Corresponding AuthorLi SH(李帅辉)
Recommended Citation
GB/T 7714
Li SH,Shu YH,Fan J. Thickness and component distributions of yttrium-titanium alloy films in multi-electron-beam physical vapor deposition[C]Proceedings of the 8th Vacuum Metallurgy and Surface Engineering,2007.
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