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Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure
Zhang Y(张吟); Zhao YP(赵亚溥); Cheng ZH
2018-02-14
发表期刊JOURNAL OF PHYSICS D-APPLIED PHYSICS
卷号51期号:6页码:65305
ISSN0022-3727
摘要The inverse problem of determining three parameters: the film thickness, the film and substrate Young's moduli of a film/substrate bilayer by indentation, is formulated and solved. The physical mechanism for the solvability of the inverse problem is that these three parameters have different impacts at different indentation depth. Their impacts are systematically studied, which also provides a different approach of finding the three parameters or refining their range. Compared with various atomic force microscopy based techniques of detecting subsurface structures, which have to deal with an extremely difficult or even an insurmountable inverse problem with the integral equation of dynamics, the inverse problem here formulated by statics is much more straightforward and simpler. Formulating and solving such an inverse problem can be of some help to the applications such as characterizing subsurface structures, the out-of-plane properties of two-dimensional (2D) materials and various bilayer structures.
关键词indentation inverse problem bilayer structure subsurface characterization
DOI10.1088/1361-6463/aaa55d
URL查看原文
收录类别SCI ; EI
语种英语
WOS记录号WOS:000423306600001
关键词[WOS]ATOMIC-FORCE MICROSCOPY ; ELASTIC-MODULUS ; THIN-FILM ; MECHANICAL-PROPERTIES ; ACOUSTIC MICROSCOPY ; CONTACT STIFFNESS ; NANOINDENTATION ; SUBSTRATE ; HARDNESS ; HETEROSTRUCTURES
WOS研究方向Physics, Applied
WOS类目Physics
项目资助者National Natural Science Foundation of China (NSFC) [11372321, 11772335, 21203038] ; Ministry of Science and Technology (MOST) of China [2016YFA0200700]
论文分区二类
力学所作者排名1
引用统计
文献类型期刊论文
条目标识符http://dspace.imech.ac.cn/handle/311007/77799
专题非线性力学国家重点实验室
作者单位1.Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China
2.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100049, Peoples R China
3.Renmin Univ China, Dept Phys, Beijing 100872, Peoples R China
4.Renmin Univ China, Beijing Key Lab Optoelect Funct Mat & Micronano D, Beijing 100872, Peoples R China
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GB/T 7714
Zhang Y,Zhao YP,Cheng ZH. Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2018,51(6):65305.
APA 张吟,赵亚溥,&Cheng ZH.(2018).Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure.JOURNAL OF PHYSICS D-APPLIED PHYSICS,51(6),65305.
MLA 张吟,et al."Determining the layers' Young's moduli and thickness from the indentation of a bilayer structure".JOURNAL OF PHYSICS D-APPLIED PHYSICS 51.6(2018):65305.
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