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Inverse Problems in the MEMS/NEMS Applications; Inverse Problems in the MEMS/NEMS Applications
Zhang Y(张吟)
2015-09-28 ; 2015-09-28
摘要

As a structure is scaled down, the ratio of surface to volume increases and the surface effects thus stand out, which may result in the different material properties from those of bulk. Therefore, some key parameters such as Young’s modulus and adhesion energy, which concern the performance and reliability of the micro/nano-electro-mechanical systems (MEMS/NEMS), are unknown. Sometimes, the direct measurements of some parameters are extremely difficult if not impossible, for example, measuring the position of an adsorbate as small as a molecule or an atom. How to use the measured quantities such as resonant frequencies and deformation to determine those key parameters forms an inverse problem. Every inverse problem requires a particular approach. In this chapter, we present some effective approaches of solving the inverse problems in the MEMS/NEMS applications. The chapter consists of two major parts: the inverse problems in (1) micro/nano mechanical resonator and (2) the stiction test of MEMS/NEMS.

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As a structure is scaled down, the ratio of surface to volume increases and the surface effects thus stand out, which may result in the different material properties from those of bulk. Therefore, some key parameters such as Young’s modulus and adhesion energy, which concern the performance and reliability of the micro/nano-electro-mechanical systems (MEMS/NEMS), are unknown. Sometimes, the direct measurements of some parameters are extremely difficult if not impossible, for example, measuring the position of an adsorbate as small as a molecule or an atom. How to use the measured quantities such as resonant frequencies and deformation to determine those key parameters forms an inverse problem. Every inverse problem requires a particular approach. In this chapter, we present some effective approaches of solving the inverse problems in the MEMS/NEMS applications. The chapter consists of two major parts: the inverse problems in (1) micro/nano mechanical resonator and (2) the stiction test of MEMS/NEMS.

专著/编著/文集名Materials and Failures in MEMS and NEMS ; Materials and Failures in MEMS and NEMS
页码219-238 ; 219-238
出版者Wiley ; Wiley
语种英语 ; 英语
ISBN号9781119083603 ; 9781119083603
文献类型图书章节
条目标识符http://dspace.imech.ac.cn/handle/311007/77973
专题非线性力学国家重点实验室
推荐引用方式
GB/T 7714
Zhang Y. Inverse Problems in the MEMS/NEMS Applications, Inverse Problems in the MEMS/NEMS Applications[Ch]. Materials and Failures in MEMS and NEMS, Materials and Failures in MEMS and NEMS,Wiley, Wiley,2015, 2015.
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