Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si

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	Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si
	Hu YQ 1; Zhao YP(赵亚溥)2
会议录名称	13th International Conference on Fracture 2013, ICF 2013
	2013
页码	2993-3002
会议名称	13th International Conference on Fracture 2013, ICF 2013
会议日期	June 16, 2013 - June 21, 2013
会议地点	Beijing, China
摘要	The MEMS/NEMS devices present an attractive prospect in many areas, especially in aviation and aerospace. Anodic bonding is one of the key technologies for the manufacturing of integrated 3-D structures of these devices. In this paper, based on experiments and detailed analysis, a systematic study will be made in depth for the mechanical behavior of anodically bonded interlayer within micro-scale structures. In accordance with a typical anodically bonded structure from one kind of MEMS micro accelerometer, a series of anodic bonding and mechanical tests were completed, for the behavior of the interlayer under quasi-static loading. The paper also presents the analysis of some important factors which influence the mechanical properties of the anodically bonded structure of Pyrex 7740 Glass/Al/Si. The metal oxidation reaction, dendritic nanostructures, and fractal patterns, which taking place at the bonding interface, were scrutinized. The experimental results demonstrate the thickness effect of the intermediate layer, and that the bonding tensile strength increases with the bonding temperature and voltage, but it decreases with the increase of the thickness of Al intermediate layer. The formation of the nanostructures in the bonding interlayer is also helpful to enhance the anodic bonding strength. Copyright © (2013) by International Conference on Fracture.
关键词	Accelerometers Aluminum Glass Nanostructures Tensile strength Anodic bonding Bonding temperatures Dendritic nanostructures Intermediate layers MEMS/NEMS Micro accelerometers Micro scale structures Quasi static loading
ISBN号	9781629933696
收录类别	EI
语种	英语
文献类型	会议论文
条目标识符	http://dspace.imech.ac.cn/handle/311007/77980
专题	非线性力学国家重点实验室
作者单位	1.College of Civil Aviation and Flight, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China; 2.State Key Laboratory of Nonlinear Mechanics (LNM), Chinese Academy of Sciences, Institute of Mechanics, Beijing 100190, China
推荐引用方式 GB/T 7714	Hu YQ,Zhao YP. Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si[C],2013:2993-3002.

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