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Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si
Hu YQ1; Zhao YP(赵亚溥)2
2013
会议名称13th International Conference on Fracture 2013, ICF 2013
会议日期June 16, 2013 - June 21, 2013
会议地点Beijing, China
会议录名称13th International Conference on Fracture 2013, ICF 2013
页码2993-3002
摘要The MEMS/NEMS devices present an attractive prospect in many areas, especially in aviation and aerospace. Anodic bonding is one of the key technologies for the manufacturing of integrated 3-D structures of these devices. In this paper, based on experiments and detailed analysis, a systematic study will be made in depth for the mechanical behavior of anodically bonded interlayer within micro-scale structures. In accordance with a typical anodically bonded structure from one kind of MEMS micro accelerometer, a series of anodic bonding and mechanical tests were completed, for the behavior of the interlayer under quasi-static loading. The paper also presents the analysis of some important factors which influence the mechanical properties of the anodically bonded structure of Pyrex 7740 Glass/Al/Si. The metal oxidation reaction, dendritic nanostructures, and fractal patterns, which taking place at the bonding interface, were scrutinized. The experimental results demonstrate the thickness effect of the intermediate layer, and that the bonding tensile strength increases with the bonding temperature and voltage, but it decreases with the increase of the thickness of Al intermediate layer. The formation of the nanostructures in the bonding interlayer is also helpful to enhance the anodic bonding strength. Copyright © (2013) by International Conference on Fracture.
关键词Accelerometers Aluminum Glass Nanostructures Tensile strength Anodic bonding Bonding temperatures Dendritic nanostructures Intermediate layers MEMS/NEMS Micro accelerometers Micro scale structures Quasi static loading
ISBN号9781629933696
收录类别EI
语种英语
文献类型会议论文
条目标识符http://dspace.imech.ac.cn/handle/311007/77980
专题非线性力学国家重点实验室
作者单位1.College of Civil Aviation and Flight, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;
2.State Key Laboratory of Nonlinear Mechanics (LNM), Chinese Academy of Sciences, Institute of Mechanics, Beijing 100190, China
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Hu YQ,Zhao YP. Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si[C],2013:2993-3002.
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