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Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si
Hu YQ1; Zhao YP(赵亚溥)2
Source Publication13th International Conference on Fracture 2013, ICF 2013
Conference Name13th International Conference on Fracture 2013, ICF 2013
Conference DateJune 16, 2013 - June 21, 2013
Conference PlaceBeijing, China
AbstractThe MEMS/NEMS devices present an attractive prospect in many areas, especially in aviation and aerospace. Anodic bonding is one of the key technologies for the manufacturing of integrated 3-D structures of these devices. In this paper, based on experiments and detailed analysis, a systematic study will be made in depth for the mechanical behavior of anodically bonded interlayer within micro-scale structures. In accordance with a typical anodically bonded structure from one kind of MEMS micro accelerometer, a series of anodic bonding and mechanical tests were completed, for the behavior of the interlayer under quasi-static loading. The paper also presents the analysis of some important factors which influence the mechanical properties of the anodically bonded structure of Pyrex 7740 Glass/Al/Si. The metal oxidation reaction, dendritic nanostructures, and fractal patterns, which taking place at the bonding interface, were scrutinized. The experimental results demonstrate the thickness effect of the intermediate layer, and that the bonding tensile strength increases with the bonding temperature and voltage, but it decreases with the increase of the thickness of Al intermediate layer. The formation of the nanostructures in the bonding interlayer is also helpful to enhance the anodic bonding strength. Copyright © (2013) by International Conference on Fracture.
KeywordAccelerometers Aluminum Glass Nanostructures Tensile strength Anodic bonding Bonding temperatures Dendritic nanostructures Intermediate layers MEMS/NEMS Micro accelerometers Micro scale structures Quasi static loading
Indexed ByEI
Document Type会议论文
Affiliation1.College of Civil Aviation and Flight, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;
2.State Key Laboratory of Nonlinear Mechanics (LNM), Chinese Academy of Sciences, Institute of Mechanics, Beijing 100190, China
Recommended Citation
GB/T 7714
Hu YQ,Zhao YP. Experiments on the mechanical behavior of anodically bonded interlayer of Pyrex Glass/Al/Si[C]13th International Conference on Fracture 2013, ICF 2013,2013:2993-3002.
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