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Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm
Liu C(刘崇); Wang LH(王连红); Zheng YT; Zeng DD(曾丹丹); Jiang JZ(蒋建政); Fan J(樊菁)
发表期刊Journal of Applied Physics
2018-12-20
卷号124期号:23页码:ID235306
ISSN0021-8979
摘要

In this study, the desorption behaviors of codeposited atoms from the growth interface of multicomponent-nanofilms have been explored through the experiments of vapor codeposition and molecular dynamics simulations. Experimentally, the stoichiometry-dependent desorption has been observed for atoms with weak surface binding, and it appears to be triggered by higher growth temperature, as inferred from the dependence of the amount of deposition on the stoichiometry of precursor films under different conditions. Numerically, we demonstrate that the sticking coefficient of weakly binding atoms depends strongly on the stoichiometry under high growth temperature. However, as the temperature decreases, the sticking coefficient becomes less sensitive to stoichiometry. The mechanisms associated with all the above phenomena have also been discussed

DOI10.1063/1.5054998
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收录类别SCI ; EI
语种英语
论文分区二类
力学所作者排名1
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文献类型期刊论文
条目标识符http://dspace.imech.ac.cn/handle/311007/78203
专题高温气体动力学国家重点实验室
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Liu C,Wang LH,Zheng YT,et al. Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm[J]. Journal of Applied Physics,2018,124(23):ID235306.
APA Liu C,Wang LH,Zheng YT,Zeng DD,Jiang JZ,&Fan J.(2018).Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm.Journal of Applied Physics,124(23),ID235306.
MLA Liu C,et al."Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm".Journal of Applied Physics 124.23(2018):ID235306.
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