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Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm
Liu C(刘崇); Wang LH(王连红); Zheng YT; Zeng DD(曾丹丹); Jiang JZ(蒋建政); Fan J(樊菁)
Source PublicationJournal of Applied Physics
2018-12-20
Volume124Issue:23Pages:ID235306
ISSN0021-8979
Abstract

In this study, the desorption behaviors of codeposited atoms from the growth interface of multicomponent-nanofilms have been explored through the experiments of vapor codeposition and molecular dynamics simulations. Experimentally, the stoichiometry-dependent desorption has been observed for atoms with weak surface binding, and it appears to be triggered by higher growth temperature, as inferred from the dependence of the amount of deposition on the stoichiometry of precursor films under different conditions. Numerically, we demonstrate that the sticking coefficient of weakly binding atoms depends strongly on the stoichiometry under high growth temperature. However, as the temperature decreases, the sticking coefficient becomes less sensitive to stoichiometry. The mechanisms associated with all the above phenomena have also been discussed

DOI10.1063/1.5054998
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Indexed BySCI ; EI
Language英语
WOS IDWOS:000454217800032
Classification二类
Ranking1
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Document Type期刊论文
Identifierhttp://dspace.imech.ac.cn/handle/311007/78203
Collection高温气体动力学国家重点实验室
Recommended Citation
GB/T 7714
Liu C,Wang LH,Zheng YT,et al. Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm[J]. Journal of Applied Physics,2018,124(23):ID235306.
APA 刘崇,王连红,Zheng YT,Zeng DD,蒋建政,&樊菁.(2018).Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm.Journal of Applied Physics,124(23),ID235306.
MLA 刘崇,et al."Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm".Journal of Applied Physics 124.23(2018):ID235306.
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