Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm | |
Liu C(刘崇); Wang LH(王连红); Zheng YT; Zeng DD(曾丹丹); Jiang JZ(蒋建政); Fan J(樊菁) | |
发表期刊 | Journal of Applied Physics |
2018-12-20 | |
卷号 | 124期号:23页码:ID235306 |
ISSN | 0021-8979 |
摘要 | In this study, the desorption behaviors of codeposited atoms from the growth interface of multicomponent-nanofilms have been explored through the experiments of vapor codeposition and molecular dynamics simulations. Experimentally, the stoichiometry-dependent desorption has been observed for atoms with weak surface binding, and it appears to be triggered by higher growth temperature, as inferred from the dependence of the amount of deposition on the stoichiometry of precursor films under different conditions. Numerically, we demonstrate that the sticking coefficient of weakly binding atoms depends strongly on the stoichiometry under high growth temperature. However, as the temperature decreases, the sticking coefficient becomes less sensitive to stoichiometry. The mechanisms associated with all the above phenomena have also been discussed |
DOI | 10.1063/1.5054998 |
URL | 查看原文 |
收录类别 | SCI ; EI |
语种 | 英语 |
WOS记录号 | WOS:000454217800032 |
论文分区 | 二类 |
力学所作者排名 | 1 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://dspace.imech.ac.cn/handle/311007/78203 |
专题 | 高温气体动力学国家重点实验室 |
推荐引用方式 GB/T 7714 | Liu C,Wang LH,Zheng YT,et al. Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm[J]. Journal of Applied Physics,2018,124,23,:ID235306. |
APA | 刘崇,王连红,Zheng YT,Zeng DD,蒋建政,&樊菁.(2018).Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm.Journal of Applied Physics,124(23),ID235306. |
MLA | 刘崇,et al."Temperature triggered stoichiometry-dependent desorption from the growth interface of nanofilm".Journal of Applied Physics 124.23(2018):ID235306. |
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